All Lam Parts & Services We Offer

Showing 1–24 of 53 results

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  716-065573-004 | LAM Coronus Pez Ring Lower, 300mm, Ceramic

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  716-066539-006 | LAM Coronus Pez Ring Upper, 300mm

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  839-012255-001 | LAM Research Inner Gate, Bellows

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  852-011060-001 | LAM Research Upper Chamber – Quick Exchange Option and Repair

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  852-011060-101 | LAM Research Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″ – Quick Exchange Option and Repair

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  852-011060-108 | LAM Research Upper Chamber, Low Pressure Oxide – 8″ – Quick Exchange Option and Repair

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  853-001198-001 | LAM Research490 Gate – Quick Exchange Option and Repair

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  853-001198-002 | LAM Research 490 Gate – Quick Exchange Option and Repair

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  853-011142-001 | LAM Research RF Gap Motor – Quick Exchange Option and Repair

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  853-012200-002 | LAM Gate Assemblies – Quick Exchange Option and Repair

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  853-012200-004 | LAM Research Gate Assemblies – Quick Exchange Option and Repair

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  853-012261-001 | LAM Research Gate Assemblies – Quick Exchange Option and Repair

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  853-012875-001 | LAM Research Gate Assemblies – Quick Exchange Option and Repair

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  853-012875-002 | LAM Research Gate Assemblies – Quick Exchange Option and Repair

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  853-090260-004 | LAM Research Gap Adjust Housing – Quick Exchange Option and Repair

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  853-442064-001 | Lam Research Inner Gate A6 Alliance Loadlock Assembly – Quick Exchange Option and Repair

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  853-442064-002 | LAM Gate Assemblies – Quick Exchange Option and Repair

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  853-442078-001 | LAM Gate Assemblies – Quick Exchange Option and Repair

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  853-800087-403 | Lam Research DC Power Supply

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  854-011153-001 | Rainbow Sub Assembly Lead Screw (Driver)

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  854-011153-002 | Rainbow Sub Assembly Lead Screw (Driven)

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  853-011142-001 | LAM Research RF Gap Motor

  Call 1-888-736-4476 to check availability.

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  853-011142-001 | LAM Research RF Gap Motor

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  852-011060-001 | LAM Research Upper Chamber

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