All Lam Parts & Services We Offer

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  716-065573-004 | LAM Coronus Pez Ring Lower, 300mm, Ceramic

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  716-066539-006 | LAM Coronus Pez Ring Upper, 300mm

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  716-086795-124 | LAM SiC Ring

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  716-149488-052 | LAM SiC Ring

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  716-276851-269 | LAM SiC Ring

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  716-276851-383 | LAM SiC Ring

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  716-276851-402 | LAM SiC Ring

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  716-276851-404 | LAM SiC Ring

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  719-210344-602 | LAM MOD, RING, EDGE, TOP, SIC, 300mm

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  719-A00511-018 | LAM SiC Ring

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  719-A05028-008 | LAM SiC Ring

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  719-A05028-016 | LAM SiC Ring

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  852-011060-101 | LAM Research Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″ – Quick Exchange Option and Repair

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  853-011142-001 | LAM Research RF Gap Motor – Quick Exchange Option and Repair

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  853-800087-403 | Lam Research DC Power Supply

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  854-011153-001 | Rainbow Sub Assembly Lead Screw (Driver)

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  854-011153-002 | Rainbow Sub Assembly Lead Screw (Driven)

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  853-011142-001 | LAM Research RF Gap Motor

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  853-011142-001 | LAM Research RF Gap Motor

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  852-011060-001 | LAM Research Upper Chamber Refurbishment

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  852-011060-101 | LAM Research Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″

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  852-011060-101 | LAM Research Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″ Refurbishment

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  852-011060-108 | LAM Research Upper Chamber, Low Pressure Oxide – 8″ Refurbishment

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  856-008059-002 | 490 Gap Rebuild Kit

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