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Save up to 50% on consumable parts!

For 25 years Semigroup has remained the authority on CMP Head & Carrier repair. We’ve rebuilt over 300,000 CMP Heads & Carriers

Don’t fall victim to insanely priced parts from the OEM! There’s another way!

SemiGroup can save you money on expensive CMP Consumable Parts.

Our expert technicians can diagnose, repair, and refurbish CMP Heads to OEM specifications. We supply thousands of consumable replacement parts to customers that meet or exceed OEM standards with significant cost savings.

Our experienced engineers & technicians are trained and certified in semiconductor OEM parts & systems refurbishment.  All our parts and systems go through the same rigorous testing you would expect from an OEM.  We’re open and here for you!

Need a quote for CMP Head repair?

No problem! Contact our service team today! Partner with SemiGroup and lower your CMP Consumable Part costs by as much as 50 percent! Click below or call (888) 736-4476.

Other Related CMP Parts & Services

  • Electronic Boxes
  • Brush Mount Assemblies
  • Reflexion Pad Conditioner
  • Arms
  • 2 Phase Drivers
  • UPA DC Distribution Boxes
  • Housing Spindle Assemblies
  • Washer Drive Rollers
  • Spindle Motors
  • Motion Controllers
  • RBC Bearings
  • Servo Motors
  • Cylinder Assemblies
  • Digital Interface Controllers
  • Fan Panels
  • Pivot Assemblies
  • Filament Controllers
  • Magnet PS Controllers
  • Precision Gear Head
  • Throttle Valves
  • HV Modules
  • Blower Motors
  • Quartz Applicator Tube
  • Assemblies
  • Turbo Controllers
  • Motor Drives
  • Power Supplies
  • Chamber Liners
  • PCB
  • Bellows Lifter Assembly
  • And so much more!

Recently Added

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We’re accountable to customers, not stockholders. We are dedicated to our customers’ success and strive to offer high-quality, long-lasting, and cost-effective parts and services.

Trust SemiGroup for the parts and repairs you need today!

SemiGroup - The Leader in After-Market Semiconductor Equipment Support

SemiGroup uses only the highest quality aftermarket parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.

How can we help YOU with those hard-to-find components? Meet us on a phone or video call and tell us about your production challenges. Let’s see if we’re a good fit! SemiGroup’s success strategy is built on long-term success for every customer!

Call 1-888-SEMIGROUP or email

Visit our online shop to request more information, browse parts, and start a new service request.