OEM Part Number 853-012200-002

LAM Research Rainbow & Alliance Inner Gate Assemblies

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The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

• Fully Disassembled
• All Parts Cleaned
• New Sensors
• New Pneumatic Air Cylinders
• New Pneumatic Air Fittings
• New Pneumatic Air Lines
• New Cam Followers
• New Bumpers for Link
• Labeled
• Over-lock Adjustment
• Flag Interrupt Adjustment
• Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed