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853-012200-002 | LAM Gate Assemblies - Quick Exchange Option and Repair

OEM Part Number 853-012200-002

LAM Research Rainbow & Alliance Inner Gate Assemblies

IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST” button and fill out the form to get started.

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed

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SKU SG853-012200-002-REP Categories ,

Description

OEM Part Number 853-012200-002

LAM Research Rainbow & Alliance Inner Gate Assemblies

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed