skip to Main Content
Made in the USA | 1-888-SEMIGROUP  |  parts@semigroup.com |
The Semigroup Quality Difference

Semigroup’s technical expertise assures you the highest quality of refurbished equipment available on the after-market. We refurbish these tools to the original equipment manufacturer’s specifications.  In fact, we’ve performed reconditioning service on over 100,000 CMP Heads and other semiconductor equipment.

We conduct complete rebuilds of Lam Research equipment in addition to performing quarterly and annual PM’s. Our  experienced technicians can refurbish, convert and upgrade your used equipment. Our turnkey solutions include the total refurbishment of the specified tool, configured to the end user’s requirements.

All our systems go through the same rigorous testing you would expect from an OEM.  We can then provide installation, warranty support as well as ongoing technical support and periodic preventative maintenance. Semigroup has a complete line of spares and consumable parts to keep your newly refurbished equipment running at the highest level of efficiency. (Rainbow and Alliance Platforms) We have a focused approach of providing Lam Research Plasma Etch Equipment (primarily Single Chamber Platforms) for Metal, Conductor and Dielectric Plasma Etch applications. Semigroup is the recommended supplier of reconditioned assemblies and service for a wide range of semiconductor processing equipment.

Semigroup is proudly a Woman-Owned Minority Business led by Jacqui “Chick” Burns.  Jacqui has served as the owner and CEO of Semigroup since 2006 and has over 13 years in the semiconductor industry.

Meet the Owner
Jacqui "Chick" Burns - A Woman Owned Business

Jacqui “Chick” Burns

Full Service & Inventory

Semigroup is a full-service company that reconditions semiconductor equipment. Our field service engineers perform on/off-site training, upgrade installations, process evaluation and consulting, system commission and decommissioning, and preventative maintenance.

Our production and test facilities are located in Dallas, Texas and we are equipped withe a large inventory of assemblies, spare parts, and consumables typically available for immediate shipment.

Contact Us to Learn More
Reconditioning Gurus

Semigroup has experienced technicians who refurbish, convert and upgrade your used equipment. We offer complete rebuilds of LAM Research equipment in addition to performing quarterly and annual PM’s. We’ve performed reconditioning services on over 50,000 CMP heads.

Get Quote
electronics2
semiconductor reconditioning

Full Service

Semigroup is a full-service company that reconditions chillers and RF generators. Our field service engineers perform on/off-site training, upgrade installations, process evaluation and consulting, system commission and decommissioning, and preventative maintenance.

semigroup-cmp-head-cleaning
What Do Our Customers Say?

TriQuint

Semigroup has consistently shown me that they provide high quality products and services that are extremely competitive. Some of the products and services I have been pleased with are their second source Consumable Parts, RF Match & RF Generator Refurbishment Services and Lam Research Assembly quick exchange program! Semigroup has helped me out on several occasions when the OEM was closed, or didn't have the part. I will call them first next time!

Philips Semiconductor

I would like to thank Semigroup for the support they gave Philips Semiconductor Fishkill facility in 2004. We were in urgent need for experienced engineering support for Lam Rainbow and Alliance platform (A6) systems for oxide, poly and metal etch. Scott Magoon and Semigroup came through in 2 weeks time with 7 experienced support engineers at a competitive price. With this support, the manufacturing availability of the systems was improved dramatically.

ST Microelectronics

I have worked with Semigroup over the last 10 years on many different types of projects.  They have ranged from a full turn key valve rebuild program to stocking one off low consumption parts for my convenience.   Scott and Chick have always been there to support my normally over demanding needs in maintaining multiple semiconductor fabs through out my career.  They have the unique ability to supply hard to find parts for a wide range of tool sets and wafer sizes.  They always put quality before everything else, but seem to maintain competitive pricing in a very cut throat second source market.

GES Associates L.L.C.

I have worked with Scott Magoon and Jacqui “Chick” Burns at SemiGroup for over 10 years and whenever I have specific part need or technical advice an a Lam Research piece of equipment, we do not hesitate to give Semigroup a call!”