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Move More Wafers With Turnkey CMP Head Refurbishment

You’re losing a week or more of critical wafer production and time if you’re still managing CMP head refurbishment in-house. Why keep operations bogged down with ordering parts and refurbishing equipment instead of producing? Your team (especially Equipment Engineers & Technicians) should be highly focused on equipment issues and manufacturing high-yielding wafers, not rebuilding CMP Heads.

Choose a dependable, accurate, and timely supply of CMP heads always in stock ready to pull without ever shutting down! SemiGroup’s turnkey CMP Head Rebuilding lets you manage fewer parts, people, and headaches so you can focus on production. Reduce the cycle time with our instant “in stock” solution. Why wait 7-14 days when you can be ready today?

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Experience & Quality Matter!

Precision CMP semiconductor manufacturing equipment requires the highest quality refurbishment and highest quality consumable parts. For example, refurbishing equipment like the Mirra 200mm Titan 1 CMP Head requires many detailed steps, meticulous attention to detail, and rigorous testing. Your team should be focused on production, not slowed down by refurbishment.

With Turnkey CMP Head service, SemiGroup’s CMP Heads are always in stock so you can swap in the new one immediately. Stop waiting weeks for parts to ship just to wait even longer for the refurbisher to finish. SemiGroup manages the parts and services for you. Get the production-ready CMP heads you need just when you need them!

Since 1998, SemiGroup has rebuilt over 200,000 CMP heads. Our refurbishment procedure currently requires 91 steps! Every CMP part pictured below is used when doing a full refurbishment on a 200mm Mirra Titan 1 CMP Head.

With Turnkey CMP Head service, SemiGroup’s CMP Heads are always in stock so you can swap in the new one immediately. Stop waiting weeks for parts to ship just to wait even longer for the refurbisher to finish. SemiGroup manages the parts and services for you. Get the production-ready CMP heads you need just when you need them!

Our Industry-Leading Process Includes:

  • Visual Inspection & Analysis
  • DATA Tracking
  • Decontamination & Cleaning
  • New O-rings
  • New Screws Torqued to Spec.
  • New Sensors & New Spring
  • New Membrane
  • New De-Chuck Bladder
  • New Rolling Diaphragm
  • New Seal Diaphragm
  • New Retaining Wear Ring
  • New Membrane Support Plate Pad
  • Replacement of air lines and air fittings
  • Bore and Gimbal Flexure plate shaft re-lubricated
  • Post rebuild clean
  • Final Visual inspection
  • Final Pressure Test to ensure Functionality

Featured: Applied Materials 200mm MIRRA Titan 1 HEAD

Semigroup’s Applied Materials 200mm Mirra Titan 1 Head Turnkey Rebuild Service has been perfected over the last 23 years. Our service extends head life expectancy and adds value for our clients so they can focus on Moving More High yielding wafers through the FAB! Download the Datasheet.

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