Protect Your Chambers. Prevent Downtime.
Infrared End Point Detectors are critical to maintaining wafer quality and protecting your chambers from costly damage. Over time, these detectors can drift out of spec—causing particle issues, misreads, and unplanned downtime.
That’s why regular servicing isn’t just a best practice—it’s a necessity.
SemiGroup now offers full refurbishment services for Infrared End Point Detectors used on Lam Research, Applied Materials, and Novellus systems. Our process restores your components to OEM specifications with a typical 4–6 week lead time, so you can plan with confidence.
✔ Reduce particle-related issues
✔ Protect your chambers
✔ Extend equipment life
Keep your process under control—before small issues become major failures.
Available IREPD Rebuilds
IREPD Refurbishment Services
Don’t have the time or expertise for DIY solutions? No problem! We can refurbish your parts and equipment FAST! Click the button below to speak to one of our knowledgeable experts.