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Available LAM Research Electrostatic Chuck OEM Part Numbers:

718-092326-061, 718-092326-081, 718-094523-261, 718-094523-281, 718-094756-061, 718-094756-081

SemiGroup Drop In Replacements

SemiGroup’s Drop In Replacement solution, is our promise that clients will have to make no configuration changes to their equipment and will see no process shifts when installing our parts.

Our SemiGroup Engineering Team rigorously scrutinizes every detail of an SG design as our replacement parts have to strictly be “Plug & Play” solutions for an OEM Part.

Our engineers previously worked in wafer fabs so they know the importance of a part working exactly as expected – the first time.

SemiGroup has been providing legacy after-market parts and assemblies for over 26 years!

These parts are newly crafted and made in the USA.

OEM Quality without the OEM Price…
Now THAT’s a winning strategy!

Get parts shipped ⚡FAST!⚡

Applications Include:
Lam Research 4400, 4420, 9400 & 9600 reactors & Metal Plasma Etch & Poly Nitride Plasma Etch Reactors

Key Terms:
Monopolar ESC, Electrostatic chuck, ESC Plasma Etch, Metal Plasma Etch, Poly Nitride Plasma Etch 9400 & 9600, Backside Helium Cooling, Anodized Aluminum ESC (Electrostatic Chuck), 150mm ESC, 200mm ESC

We stock a wide selection of LAM Research Electrostatic Chuck parts that are highly reliable and are guaranteed to perform as the OEM part.  We strive to have these parts ***IN-STOCK*** and they are qualified in wafer fabs all over the world!

Call 1-888-736-4476 to check availability.

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We’re accountable to customers, not stockholders. We are dedicated to our customers’ success and strive to offer high-quality, long-lasting, and cost-effective parts and services.

Trust SemiGroup for the parts and repairs you need today!

SemiGroup - The Leader in After-Market Semiconductor Equipment Support

SemiGroup uses only the highest quality aftermarket parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.

How can we help YOU with those hard-to-find components? Meet us on a phone or video call and tell us about your production challenges. Let’s see if we’re a good fit! SemiGroup’s success strategy is built on long-term success for every customer!

Call 1-888-SEMIGROUP or email

Visit our online shop to request more information, browse parts, and start a new service request.