All Lam Parts & Services We Offer

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  852-011060-001 | LAM Research Upper Chamber Refurbishment

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  852-011060-101 | LAM Research Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″

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  852-011060-101 | LAM Research Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″ Refurbishment

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  852-011060-108 | LAM Research Upper Chamber, Low Pressure Oxide – 8″

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  852-011060-108 | LAM Research Upper Chamber, Low Pressure Oxide – 8″ Refurbishment

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  853-090260-004 | LAM Research Gap Adjust Housing

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  853-442078-001 | LAM Gate Assemblies

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  853-140013-001 | LAM Gate Assemblies

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  853-012875-002 | LAM Research Gate Assemblies

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  853-012875-001 | LAM Research Gate Assemblies

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  853-012350-001 | LAM Research Gate Assemblies

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  853-012261-001 | LAM Research Gate Assemblies

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  853-012200-004 | LAM Research Gate Assemblies

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  853-012200-002 | LAM Research Gate Assemblies

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  853-442064-001 | Lam Research Inner Gate A6 Alliance Loadlock

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  853-442064-002 | LAM Gate Assemblies

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  715-011531-016 | LAM Research Aluminum Anodized Upper Electrode

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  715-018991-228 | LAM Research Anodized Upper Electrode

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  716-028028-004 | LAM Research Upper Electrode Clamp Ring

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  716-330121-001 | LAM Research WDO,RF SHPD CER,FXD GAPN, 200mm

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  716-330121-003 | LAM Research WDO,SHPD,1/2 HGHT,6.5 DIA HOLS

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  839-011907-902 | LAM Research Electrode, Silicon HI Temp. Polish, 8 in

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  SG853-007526-002 | Lam Research AutoEtch Inner Gate Cylinder 853-007526-002

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  SG853-007526-001 | Lam Research AutoEtch Outer Gate Cylinder 853-007526-001

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