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Featured Service

MKS Astron AX7680, 6 Liter Unit Refurbishment
All RPS Generator Services

Expect longer life from your RPS generators when you refurbish with SemiGroup. Our process includes all-new parts that improve performance and extend the life span of remote plasma source equipment. All our parts are supplied through a U.S. partner, including discontinued and customized parts.

Refurbished Remote Plasma Sources (RPS) Include

  • Anodized Chamber Aluminum Block: New SG coating material applied
  • Anodized Gas Nozzle: New SG coating material applied
  • Consumable Parts: Kalez O-Ring, Ceramic Ring, Sapphire Glass, Ignition Button, etc.
  • PCB Electric Board: Power FET, Resistance, Capacitor, Transformer, Converter, etc.

Remote Plasma Source Refurbishment Process

Our RPS refurbishment process includes three main steps before parts are packed and released. First, the RPS passes an incoming visual inspection and detailed diagnostic tests before disassembly. Our diagnostic includes cause analysis for failure symptoms with our Smart Power Monitoring System (SPMS).

Then our expert technicians refurbish and clean the PCB board, replace all consumable parts, and exchange the aluminum block and plasma source before it’s assembled once again. Every RPS is refurbished with a brand new Gas Nozzle according to our policy and new aluminum coating material to prolong the life span to more than twelve months. Other competitors only make it to six.

The third step in our RPS refurbishment process is the repeatability test. We check for leaks, perform an ignition and plasma test, an over temp check and aging check. Finally, the RPS is packed up and released.

Benefits of RPS Refurbishment with SemiGroup

  • All new parts.
  • All parts are supplied through a U.S. partner, including discontinued and customized parts.
  • Life span extension is expected with improvements.
  • Improvements: new coating material application, rounded corner of the aluminum block.
  • Calibration tests based on OEM specifications.
  • Troubleshooting available
  • Fast lead time
  • Competitive pricing

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We’re accountable to customers, not stockholders. We are dedicated to our customers’ success and strive to offer high-quality, long-lasting, and cost-effective parts and services.

Trust SemiGroup for the parts and repairs you need today!

SemiGroup - The Leader in After-Market Semiconductor Equipment Support

SemiGroup uses only the highest quality aftermarket parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.

How can we help YOU with those hard-to-find components? Meet us on a phone or video call and tell us about your production challenges. Let’s see if we’re a good fit! SemiGroup’s success strategy is built on long-term success for every customer!

Call 1-888-SEMIGROUP or email

Visit our online shop to request more information, browse parts, and start a new service request.