Description
OEM Part Number 853-442064-002
LAM Research Rainbow & Alliance Inner Gate Assemblies
The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.
The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.
Features
- Fully Disassembled
- All Parts Cleaned
- New Sensors
- New Pneumatic Air Cylinders
- New Pneumatic Air Fittings
- New Pneumatic Air Lines
- New Cam Followers
- New Bumpers for Link
- Labeled
- Over-lock Adjustment
- Flag Interrupt Adjustment
- Full Functionality Tested on an Actual Lam Rainbow Tool
Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed
