skip to Main Content
Made in the USA | 1-888-SEMIGROUP  | | Contact Us

LAM Research Harmonic Arm Drive Assembly

SemiGroup has LAM Research Harmonic Arm Drive Assembly units available for Quick Exchange or you can send us yours for repair.  Our experienced technicians can refurbish, convert and upgrade your used equipment and parts to your specifications.  After our expert repair service is complete, your equipment will be restored and refurbished to original OEM quality standards and performance or better.

Our Quick Exchange program ships a new or refurbished unit to you immediately, getting you back in production as fast as possible.  Our standard refurbishment service typically has a 2-4 week lead time.

853-012175-004 | Harmonic Arm Drive

Did You Know?

SemiGroup stocks a wide selection of LAM Research Harmonic Arm Drive Assemblies that provides highly reliable and repeatable wafer placement, in addition to other assembly parts.  Finding a replacement product is easy!  Click below to browse by part or type your OEM part number into the search bar.

Featured LAM Research Harmonic Arm Drive Assembly Replacement Part

The LAM Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Part Name:  Harmonic Arm Drive Assembly
Part Brand: LAM Research
OEM:  LAM Research
OEM #: 853-012123-004

Download Datasheet

Applications Include:

All Rainbow Standalone Platforms


New Belts, New Bearings, New Quad Seals, New O-rings, New Sensors, New Stepper Motors, New Connectors (Metal or Viking), New Wiring, New Pins, Labeled, Fully Disassembled, All Parts Cleaned, Full Functionality Tested on an, Actual Lam Rainbow Tool

New Harmonic Core Replacement Option Available To Address Wafer Handling Issues (See Photo)

*Product includes a 2 year warranty. MADE IN THE USA.

Call 1-888-736-4476 to check availability

Having Trouble With Your Harmonic Arm Drive?  Let Our Experts Take a Look!

How Do We Do It?

It’s simple –  we don’t compromise. SemiGroup uses only the highest quality after-market parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We are dedicated to our customer’s success and strive to offer high quality, long lasting, and cost effective parts and service.

Personalized Approach

When you have a problem with your harmonic arm drive, our team of experts will take the time to listen to you, assess the problem, and offer ways to improve your equipment’s performance beyond just a repair.  We can help you customize your equipment to better meet the needs of your application.

Trust SemiGroup for the parts and repair you need today!