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LAM Research Harmonic Arm Drive Assembly Replacement Part

OEM Part Number
853-012123-004
The LAM Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.
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⚡ Get parts shipped immediately!

Our Quick Exchange program ships a new or refurbished unit to you immediately, getting you back in production as fast as possible.

We stock a wide selection of LAM Research Harmonic Arm Drive Assemblies that provide highly reliable and repeatable wafer placement, in addition to other assembly parts.

Get a new or refurbished unit shipped immediately or send yours for repair!

SemiGroup has LAM Research Harmonic Arm Drive Assembly units available for Quick Exchange or you can send us yours for repair. Our experienced technicians can refurbish, convert and upgrade your used equipment and parts to your specifications. After our expert repair service is complete, your equipment will be restored and refurbished to original OEM quality standards and performance or better.

Our Quick Exchange program ships a new or refurbished unit to you immediately, getting you back in production as fast as possible. Our standard refurbishment service typically has a 2-4 week lead time.

LAM Research Harmonic Arm Drive Repair Video

SemiGroup stocks a wide selection of LAM Research Harmonic Arm Drive Assemblies that provides highly reliable and repeatable wafer placement, in addition to other assembly parts.

When you have a problem with your harmonic arm drive, our team of experts will take the time to listen to you, assess the problem, and offer ways to improve your equipment’s performance beyond just a repair.  We can help you customize your equipment to better meet the needs of your application.

Finding a replacement product is easy! Click below to browse by part or type your OEM part number into the search bar.

Applications Include:
All Rainbow Standalone Platforms

Features:
New Belts, New Bearings, New Quad Seals, New O-rings, New Sensors, New Stepper Motors, New Connectors (Metal or Viking), New Wiring, New Pins, Labeled, Fully Disassembled, All Parts Cleaned, Full Functionality Tested on an Actual LAM Rainbow Tool.

Includes a 2-year warranty. MADE IN THE USA.

Call 1-888-736-4476 to check availability.

New Harmonic Core Replacement Option Available To Address Wafer Handling Issues.

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We’re accountable to customers, not stockholders. We are dedicated to our customers’ success and strive to offer high-quality, long-lasting, and cost-effective parts and services.

Trust SemiGroup for the parts and repairs you need today!

SemiGroup - The Leader in After-Market Semiconductor Equipment Support

SemiGroup uses only the highest quality aftermarket parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.

How can we help YOU with those hard-to-find components? Meet us on a phone or video call and tell us about your production challenges. Let’s see if we’re a good fit! SemiGroup’s success strategy is built on long-term success for every customer!

Call 1-888-SEMIGROUP or email parts@semigroup.com.

Visit our online shop to request more information, browse parts, and start a new service request.