The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST“ button and fill out the form to get started.

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Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

• Brand New Gates
• Exchange & Refurbishing Services Available
• New Anodized Door
• New Gate Stops
• New Screws
• New Bearings
• New Bushings
• New Shims
• New Spring
• New Sprocket
• New Compression Fitting
• New Mounting Hub
• New Clevis
• New Roll Pins
• Full Functionality Tested