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853-001198-002 | 490 Gate – Quick Exchange Option and Repair

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST“ button and fill out the form to get started.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

  • Brand New Gates
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

Call 1-888-736-4476 to check availability

SKU: 853-001198-002-REP Category:

Description

OEM Part Number 853-001198-002

LAM Research Auto Etch Gate Corrosion Resistant Inner

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

  • Brand New Gates
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

Additional information

CONDITION

Buy Outright, Quick Exchange, Refurbishment Service Available – Call for RMA#