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Semiconductor Equipment Parts


Poorly maintained semiconductor equipment
can cost you thousand$.

What Makes Semigroup Different?

OEM Specifications

OEM Specifications

Semigroup’s technical expertise assures you the highest quality of brand new & refurbished equipment available on the after-market.

We refurbish your parts & equipment to the original equipment manufacturer’s specifications.

Rigorous Testing

Rigorous Testing

All our parts and systems go through the same rigorous testing you would expect from an OEM.

We provide installation, warranty support as well as ongoing technical support and periodic preventative maintenance.

Experience Matters

Experience Matters

Our experienced engineers & technicians are trained and certified in semiconductor OEM parts & systems refurbishment.

We can convert and upgrade your used equipment for a total refurbishment of your specified tool.

For reconditioning and servicing of semiconductor processing equipment,
We are your #1 choice.

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Click below to find parts & equipment datasheets

"Semigroup has the unique ability to supply hard to find parts for a wide range of tool sets and wafer sizes.  They always put quality before everything else, but seem to maintain competitive pricing..."

Chris Lawrence
ST Microelectronics
Rating: 5

"I have worked with Scott Magoon and Jacqui “Chick” Burns at SemiGroup for over 10 years and whenever I have specific part need or technical advice an a Lam Research piece of equipment, we do not hesitate to give Semigroup a call!”

Glenn Shows - President/CEO
GES Associates L.L.C
Rating: 5

"Semigroup came through"

Rich Greer
Philips Semiconductor
Rating: 5