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CMP Head Repair Service

During the past 25 yearsSemiGroup has rebuilt over 300,000 CMP heads. Our refurbishment procedure currently requires 91 steps! Our experienced technicians can refurbish, convert and upgrade your used equipment and parts.  After our CMP Head Repair service is complete, your equipment will be restored and refurbished to original OEM quality standards and performance or better.

Request CMP Repair Service

How Do We Do It?

It’s simple –  we don’t compromise. SemiGroup uses only the highest quality after-market parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.  In fact, our CMP Head Repair for an Applied Materials CMP Head rebuild includes an 83 point quality check!

A common reason why CMP Heads fail is due to low quality consumable parts.  OEM products can be built with consumable parts that fail after a short time. That’s why we use the highest quality after-market components and parts to refurbish and restore your CMP Heads. Often times, our refurbished CMP Heads are in better condition than what is produced by OEMs.

Transparency Guarantee

At SemiGroup, we guarantee to provide you with transparency about why your CMP head is failing and how to fix it.  We are dedicated to our customer’s success and strive to offer high quality, long lasting, and cost effective CMP Head parts and service.

Personalized Approach

When you have a problem with a CMP head, our team of experts will take the time to listen to you, assess the problem, and offer ways to improve your equipment’s performance beyond just a repair.  We can help you customize your equipment to better meet the needs of your application.

Trust SemiGroup for the parts and repair you need today!

Did You Know?

SemiGroup stocks a wide selection of CMP head replacement parts that can be matched to OEM part numbers? Finding a product is easy!  Click below to browse by part or type your OEM part number into the search bar.

Featured CMP Replacement Part

This NEW Brush Mount Assembly Replacement is designed and manufactured by SemiGroup as a drop in replacement for Applied Materials Brush Mount Assembly OEM part number 0010-05398.

Part Name:  Brush Mount Assembly Replacement
Part Brand: Semigroup
OEM:  Applied Materials
OEM #: 0010-05398

Product includes a 3 month warranty.

Call 1-888-736-4476 to check availability

Applied Materials Brush Mount Assembly

Having Trouble With Your CMP Heads?  Let Our Experts Take a Look!