OEM Part Number 853-012875-002

LAM Research Rainbow & Alliance Inner Gate Assemblies

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The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms. The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

• Fully Disassembled
• All Parts Cleaned
• New Sensors
• New Pneumatic Air Cylinders
• New Pneumatic Air Fittings
• New Pneumatic Air Lines
• New Cam Followers
• New Bumpers for Link
• Labeled
• Over-lock Adjustment
• Flag Interrupt Adjustment
• Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed

OEM Part Number 853-012200-004

LAM Research Rainbow & Alliance Inner Gate Assemblies

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms. The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

• Fully Disassembled
• All Parts Cleaned
• New Sensors
• New Pneumatic Air Cylinders
• New Pneumatic Air Fittings
• New Pneumatic Air Lines
• New Cam Followers
• New Bumpers for Link
• Labeled
• Over-lock Adjustment
• Flag Interrupt Adjustment
• Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed

OEM Part Number 853-442064-002

LAM Research Rainbow & Alliance Inner Gate Assemblies

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms. The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

• Fully Disassembled
• All Parts Cleaned
• New Sensors
• New Pneumatic Air Cylinders
• New Pneumatic Air Fittings
• New Pneumatic Air Lines
• New Cam Followers
• New Bumpers for Link
• Labeled
• Over-lock Adjustment
• Flag Interrupt Adjustment
• Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry. IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST“ button and fill out the form to get started.

Download Datasheet

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

• Brand New Gates
• Exchange & Refurbishing Services Available
• New Anodized Door
• New Gate Stops
• New Screws
• New Bearings
• New Bushings
• New Shims
• New Spring
• New Sprocket
• New Compression Fitting
• New Mounting Hub
• New Clevis
• New Roll Pins
• Full Functionality Tested

OEM Part Number 853-001198-001

LAM Research Auto Etch Gate Corrosion Resistant Outer IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST“ button and fill out the form to get started.

Download Datasheet

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

• Brand New Gates Available
• Exchange & Refurbishing Services Available
• New Anodized Door
• New Gate Stops
• New Screws
• New Bearings
• New Bushings
• New Shims
• New Spring
• New Sprocket
• New Compression Fitting
• New Mounting Hub
• New Clevis
• New Roll Pins
• Full Functionality Tested