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The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry. Applications Include: All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.Features
- Brand New Gates Available
- Exchange & Refurbishing Services Available
- New Anodized Door
- New Gate Stops
- New Screws
- New Bearings
- New Bushings
- New Shims
- New Spring
- New Sprocket
- New Compression Fitting
- New Mounting Hub
- New Clevis
- New Roll Pins
- Full Functionality Tested