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853-012875-001 | LAM Gate Assemblies

OEM Part Number 853-012875-001

LAM Research Rainbow & Alliance Inner Gate Assemblies

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed

Call 1-888-736-4476 to check availability.

SKU: 853-012875-001-BO Categories: ,

Description

OEM Part Number 853-012875-001

LAM Research Rainbow & Alliance Inner Gate Assemblies

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool

Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed