CMP Parts/Consumables

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  SG0190-77140 | AMAT Skin Cover, Long Side, 200mm Part Number 0190-77140

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  SG02-460845-00 | IPEC Pad Backer, 200mm Part Number 02-460845-00

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  SG0279533-00 | KLA Assy Fingered Fork with Pivot Pads, 300mm Part Number 0279533-00

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  SG04-367341-00 | IPEC Carrier, 200mm Part Number 04-367341-00

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  SG0720-738198 | IPEC Holder Standoff Wafer, 200mm Part Number 0720-738198

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  SG1000-2104 | Membrane, Silicone, 8″ Titan Head

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  SG1000-2105 | Membrane, Silicone, 8″ Titan Head

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  SG110103860 | Axcelis Assy Vac End Effector, Adjustable, 300mm Part Number 110103860

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  SG111050-4 | AMAT Diaphragm Head, 200mm Part Number 111050-4

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  SG111T1403-05 | AMAT/Semitool Retainer Lower Rotor and MGNTR Index Capsule II, 300mm for Part Number 111T1403-05

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  SG111T1406-09 | AMAT/Semitool Door Capsule II, 300mm for Part Number 111T1406-09

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  SG1420-717038-T | IPEC Wear Ring, 200mm Part Number 1420-717038-T

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  SG15-174936-00 | IPEC Diaphragm, Overlay, T3 Wear Ring, 200mm Part Number 15-174936-00

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  SG170051550 | Axcelis Insulator Base, 300mm Part Number 170051550

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  SG170051560 | Axcelis Insulator Screw, 300mm Part Number 170051560

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  SG17106390 | Easton Seal Set, Extended Seal, 200mm Part Number 17106390

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  SG17A0476 | Main Post Module, 200mm Part Number 17A0476

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  SG17C6273 | Axcelis Guide Wafer Holder, 300mm Part Number 17C6273

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  SG18-182211-00 | IPEC Membrane, 200mm Part Number 18-182211-00

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  SG18-456163-00 | IPEC Seal, 200mm Part Number 18-456163-00

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  SG190003960 | Axcelis Fork, 300mm Part Number 190003960

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  SG1910-328844-11 | TEL Wafer Block, 200mm Part Number 1910-328844-11

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  SG1910-345144-12 | TEL Chuck Pin, 200mm Part Number 1910-345144-12

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  SG2001107 | HDP Holder Pin, 300mm Part Number 2001107

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