OEM Part Number 853-021631-003

LAM Research Paddle Lifter Assembly

IN A RUSH??  Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST!  Our standard refurbishment service is also available typically with a 2-4 week lead time.  Call us at 1-888-736-4476 or go to the “GET HELP FAST” button and fill out the form to get started.

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The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Lam Research Standalone 4520i & 9600 Platforms.

Features

• New Bellows Assembly
• New Silicon Bronze Linear Adjust Screw
• New Stepper Motor
• New Linear & Thrust Bearings
• New Thrust Washers
• New D-Sub or Viking Connectors
• Fully Disassembled
• All Parts Cleaned and Re-anodized as needed
• Helium Leak Tested
• Full Functionality Tested on an actual Lam machine