OEM Part Number 853-021924-003
LAM Research Paddle Lifter Assembly
The LAM Research Paddle Lifter cycles the heated paddle up & down with precision.
All LAM Research Standalone 4520i & 9600 Platforms.
- New Bellows Assembly
- New Silicon Bronze Linear Adjust Screw
- New Stepper Motor
- New Linear & Thrust Bearings
- New Thrust Washers
- New D-Sub or Viking Connectors
- Fully Disassembled
- All Parts Cleaned and Re-anodized as needed
- Helium Leak Tested
- Full Functionality Tested on an actual Lam machine