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OEM LRC
OEM Platform Rainbow
Wafer Size 150mm
OEM Part Number SG-1000-3005
Our Upgraded ESC bolts into the same location as the Lam Research
OEM Part Number 718-094756-061
Base Material Aluminum Anodized
Chuck Type Thermal Sprayed Coulombic ESC
Insulated Base Layer 99.95% Alumina
Electrode Proprietary Conductive Ceramic
Top Coat Thermal Sprayed 99.97 Purity
Overall Flatness <.0002 Inches
Voltage + / - 650 volts to 1800 volts
Clamp Time 2-3 Seconds
De Chuck Time 2-3 Seconds
Can Be Refurbished to Like New YES
Chuck Type Thermal Sprayed Coulombic ESC
Insulated Base Layer 99.95% Alumina
Electrode Proprietary Conductive Ceramic
Top Coat Thermal Sprayed 99.97 Purity
Overall Flatness <.0002 Inches
Voltage + / - 650 volts to 1800 volts
Clamp Time 2-3 Seconds
De Chuck Time 2-3 Seconds
Can Be Refurbished to Like New YES