Download Datasheet
OEM LRC
OEM Platform Rainbow
Wafer Size 200mm
OEM Part Number SG-1000-3004
Our Upgraded ESC bolts into the same location as the Lam Research
OEM Part Number 839-440462-308 & 839-440462-508
Base Material Aluminum Anodized
Chuck Type Thermal Sprayed Coulombic ESC
Insulated Base Layer 99.95% Alumina
Electrode Proprietary Conductive Ceramic
Top Coat Thermal Sprayed 99.97 Purity
Overall Flatness <.0002 Inches
Voltage + / - 650 volts to 1800 volts
Clamp Time 2-3 Seconds
De Chuck Time 2-3 Seconds
Can Be Refurbished to Like New YES
Chuck Type Thermal Sprayed Coulombic ESC
Insulated Base Layer 99.95% Alumina
Electrode Proprietary Conductive Ceramic
Top Coat Thermal Sprayed 99.97 Purity
Overall Flatness <.0002 Inches
Voltage + / - 650 volts to 1800 volts
Clamp Time 2-3 Seconds
De Chuck Time 2-3 Seconds
Can Be Refurbished to Like New YES