Description

Semigroup Part Number SG-1000-3005 is the Upgraded Style ESC for OEM Part Number 718-094756-061

Semigroup’s New & Improved Design 150mm, Thermal Sprayed ESC, Coulombic. SG-1000-3005 is an upgraded style of “ESC” with newer Electrostatic Chucking Technology used for LED, GaN, Silicon, SiC, Sapphire, Glass Wafer etc and can be employed in place of Lam Research OEM Part number 718-094756-061.

Product Information

Base Material                                         Aluminum Anodized

Chuck Type                                            Thermal Sprayed Coulombic ESC

Insulated Base Layer                              99.95% Alumina

Electrode                                                 Proprietary Conductive Ceramic

Top Coat Thermal Sprayed                     99.97 Purity

Overall Flatness                                      <.0002 Inches

Voltage + / –                                             650 volts to 1800 volts

Clamp Time                                              2-3 Seconds

De Chuck Time                                        2-3 Seconds

Can Be Refurbished to Like New            YES