Description

Semigroup Part Number SG-1000-3004 Upgraded Style ESC for OEM Part Number 839-440462-308 / 839-440462-508

Semigroup’s New & Improved Design 200mm, ESC Thermal Sprayed, Coulombic. SG-1000-3004 is an upgraded style of “ESC” with newer Electrostatic Chucking Technology used for LED, GaN, Silicon, SiC, Sapphire, Glass Wafer, etc and can be employed in place of Lam Research OEM Part Number’s 839-440462-308 & 839-440462-508.

Product Information

Base Material                                         Aluminum Anodized

Chuck Type                                            Thermal Sprayed Coulombic ESC

Insulated Base Layer                              99.95% Alumina

Electrode                                                 Proprietary Conductive Ceramic

Top Coat Thermal Sprayed                     99.97 Purity

Overall Flatness                                      <.0002 Inches

Voltage + / –                                             650 volts to 1800 volts

Clamp Time                                              2-3 Seconds

De Chuck Time                                        2-3 Seconds

Can Be Refurbished to Like New            YES