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Parts

853-012123-001 Lam Research Harmonic Drive853-012123-001 Lam Research Harmonic Drive

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The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012123-004 Lam Research Harmonic Drive853-012123-004 Lam Research Harmonic Drive

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Custom Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-001 Lam Research Harmonic Drive853-012175-001 Lam Research Harmonic Drive

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-002 Lam Research Harmonic Drive853-012175-002 Lam Research Harmonic Drive

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-003 Lam Research Harmonic Drive853-012175-003 Lam Research Harmonic Drive

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-004 Lam Research Harmonic Drive853-012175-004 Lam Research Harmonic Drive

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-032776-002 Lam Research Paddle Lifter853-032776-002 Lam Research Paddle Lifter

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The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Lam Research Standalone 4520i & 9600 platforms.

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam machine

853-032776-605 Lam Research Paddle Lifter853-032776-605 Lam Research Paddle Lifter

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The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Rainbow Standalone 4520i & 9600 platforms

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam machine

853-021924-003 Lam Research Paddle Lifter853-021924-003 Lam Research Paddle Lifter

Download Datasheet

The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Lam Research Standalone 4520i & 9600 Platforms.

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam machine

853-032776-001 Lam Research Paddle Lifter853-032776-001 Lam Research Paddle Lifter

Download Datasheet

The Lam Research Paddle Lifter cycles the heated paddle up & down with precision accuracy.

Applications Include:

All Rainbow Standalone 4520i & 9600 Platforms.

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam Machine

853-001198-002 AutoEtch Inner Gate Assembly853-001198-002 AutoEtch Inner Gate Assembly

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The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

  • Brand New Gates
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

853-001198-001 AutoEtch Outer Gate Assembly853-001198-001 AutoEtch Outer Gate Assembly

Download Datasheet

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

 

  • Brand New Gates Available
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

PTS03001UNIV Varian-Agilent TriScroll 300 PumpPTS03001UNIV Varian-Agilent TriScroll 300 Pump

Download Datasheet

The TriScroll 300 series features two-stage dry scroll pumps that deliver high pumping speeds and low base pressure. TriScroll pumps feature proven reliability and durability, providing consistent performance and superior cost of ownership.

Features

Major Rebuild:

  • Completely disassemble the pump module
  • Completely clean all internal parts
  • Install new tip seals and o-rings
  • Assembly, Sync Crank Pins (3)
  • Main crank shaft replaced as needed (at an additional cost)
  • Remove all old bearings and replace with new bearings
  • Perform bench test
  • All Varian-Agilent TriScroll 300 pumps are tested to a base pressure of 10 millitorr or less

 

 

Standard Rebuild:

  • Completely disassemble the pump module
  • Completely clean all internal parts
  • Pack bearings with high performance vacuum grease
  • Install new tip seals and o-rings
  • Perform bench test
  • All Varian-Agilent TriScroll 300 pumps are tested to a base pressure of 10 millitorr or less

PTS06001UNIV Varian-Agilent TriScroll 600 PumpPTS06001UNIV Varian-Agilent TriScroll 600 Pump

Download Datasheet

The TriScroll 600 series features two-stage dry scroll pumps that deliver high pumping speeds and low base pressure. TriScroll pumps feature proven reliability and durability, providing consistent performance and superior cost of ownership.

Major Rebuild:

  • Completely disassemble the pump module
  • Completely clean all internal parts
  • Install new tip seals and o-rings
  • Assembly, Sync Crank Pins (3)
  • Main crank shaft replaced as needed (at an additional cost)
  • Remove all old bearings and replace with new bearings
  • Perform bench test
  • All Varian-Agilent TriScroll 600 pumps are tested to a base pressure of 10 millitorr or less

 

 

Standard Rebuild:

  • Completely disassemble the pump module
  • Completely clean all internal parts
  • Pack bearings with high performance vacuum grease
  • Install new tip seals and o-rings
  • Perform bench test
  • All Varian-Agilent TriScroll 600 pumps are tested to a base pressure of 10 millitorr or less

853-012200-002 Lam Research Gate Drive Inner Assembly853-012200-002 Lam Research Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012200-004 Lam Research 9600 Gate Drive Inner Assembly853-012200-004 Lam Research 9600 Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012261-001 Lam Research Gate Drive Inner Assembly853-012261-001 Lam Research Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012875-002 Lam Research 9600 Gate Drive Inner Assembly853-012875-002 Lam Research 9600 Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool

***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012875-001 Lam Research Gate Drive Inner Assembly853-012875-001 Lam Research Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012100-003 Lam Research Arm Housing Assembly853-012100-003 Lam Research Arm Housing Assembly

Download Datasheet

The Lam Research Arm Housing Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Bearings
  • New Screws
  • New Spindle As Needed
  • New Extension Spring As Needed
  • New Drive Cable As Needed
  • Arm Housing Cover Helium Leak Checked
  • Full Functionality Tested on an Actual Lam Rainbow Tool for Parallelism & Repeatability

853-012100-001 Lam Research Arm Housing Assembly853-012100-001 Lam Research Arm Housing Assembly

Download Datasheet

The Lam Research Arm Housing Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Bearings
  • New Screws
  • New Spindle As Needed
  • New Extension Spring As Needed
  • New Drive Cable As Needed
  • Arm Housing Cover Helium Leak Checked
  • Full Functionality Tested on an Actual Lam Rainbow Tool for Parallelism & Repeatability

853-012100-004 Lam Research Arm Housing Assembly853-012100-004 Lam Research Arm Housing Assembly

Download Datasheet

The Lam Research Arm Housing Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Bearings
  • New Screws
  • New Spindle As Needed
  • New Extension Spring As Needed
  • New Drive Cable As Needed
  • Arm Housing Cover Helium Leak Checked
  • Full Functionality Tested on an Actual Lam Rainbow Tool for Parallelism & Repeatability

853-442064-002 LAM Research Gate Drive Inner Assembly853-442064-002 LAM Research Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-442078-001 Lam Research Gate Drive Inner Assembly853-442078-001 Lam Research Gate Drive Inner Assembly

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

C-2134-086-0001 Ebara Rotary UnionC-2134-086-0001 Ebara Rotary Union

Download Datasheet

Semigroup offers service and support for various OEM CMP sub-assemblies.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • Lap & Polish All Carbide Pieces
  • Install New Springs, O-rings, Bearings, and Seals
  • Re-grease As Needed
  • Re-assemble to OEM Spec
  • Pressure Test That Assembly is Leak Tight
  • New Carbide Pieces Made As Needed

852-011060-001 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive)852-011060-001 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive)

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

853-012123-500 Lam Research Harmonic Drive853-012123-500 Lam Research Harmonic Drive

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Custom Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

0010-25303 | Applied Materials 300MM LK Pad Conditioner Arm0010-25303 | Applied Materials 300MM LK Pad Conditioner Arm

Download Datasheet

Applied Materials 300MM LK Pad Conditioner Arm

Features

  • New Bearings
  • New O-rings
  • Fully Disassembled
  • All Parts Cleaned
  • Harmonic Drive, Wave Generator, Flex Spline, Circular Spline (Disassemble and inspect, clean, regrease and reassemble).
  • All Fasteners Replaced
  • Test and Check Servo Motors (Repair If needed).
  • Powder Coating Service
  • Sensor Replacement
  • Boot Replacement

0010-12313 | Applied Materials 300MM HVM Reflexion Pad Conditioner Arm0010-12313 | Applied Materials 300MM HVM Reflexion Pad Conditioner Arm

Download Datasheet

Applied Materials 300MM HVM Reflexion Pad Conditioner Arm

Features

  • New Bearings
  • New O-Rings
  • Fully Disassembled
  • All Parts Cleaned
  • Harmonic Drive, Wave Generator, Flex Spline, Circular Spline (Disassemble and inspect, clean, regrease and reassemble).
  • All Fasteners Replaced
  • Test and Check Servo Motors (Repair if needed).
  • Powder Coating Service
  • Sensor Replacement
  • Boot Replacement

853-012500-003 | Edge Sensor Assembly853-012500-003 | Edge Sensor Assembly

Download Datasheet

Edge Sensor Assembly

Features

  • New Fiber Optic Amplifier
  • New Fiber Optics X 2
  • New Stepper Motor
  • New Viking or Misumi Connectors
  • Fully Disaasemble
  • All Parts Cleaned
  • Full Functionality Tested on actual Lam Machine
  • New Opto isolator

SG660-091821-001 | Semigroup Engineered **New** Drop in Replacement for Lam Power Supply 660-091821-001, +5, +15, -15SG660-091821-001 | Semigroup Engineered **New** Drop in Replacement for Lam Power Supply 660-091821-001, +5, +15, -15

Download Datasheet

Semigroup **New** Drop in Replacement (Engineered by Semigroup) for Lam Research Power Supply 660-091821-001, +5, +15, -15

Features

  • Mounting Bracket installed on Power Supply
  • All Wire Connection are Compatible with Lam Tools
  • Voltage Sense on 5V 40 AMP
  • CE Certification Included
  • Red & Black Color Terminals for Easy Installation
  • Full Functionality Tested on an Actual Lam Tool -002 AC/DC Box

SG660-091820-001 | Semigroup** New** Drop in replacement (Engineered by Semigroup) for Lam Research Power Supply 660-091820-001SG660-091820-001 | Semigroup** New** Drop in replacement (Engineered by Semigroup) for Lam Research Power Supply 660-091820-001

Download Datasheet

Semigroup** New** Drop in replacement (Engineered by Semigroup) for Lam Research Power Supply 660-091820-001

Features

  • Mounting Bracket Installed on Power Supply
  • All Wire Connection are Compatible with Lam Tools
  • Voltage Inhibit Works with Lam 24 Volt Actuator Switch
  • EC Certification Included
  • Red and Black Terminals for Easy Installation
  • Full Functionality Test on an Actual Lam Tool -002 AC/DC Box

853-012500-002| Edge Sensor Assembly853-012500-002| Edge Sensor Assembly

Download Datasheet

Edge Sensor Assembly

Features

  • New Fiber Optic Amplifier
  • New Fiber Optics X 2
  • New Stepper Motor
  • New Viking or Misumi Connectors
  • Fully Disaasemble
  • All Parts Cleaned
  • Full Functionality Tested on actual Lam Machine
  • New Opto isolator

INR-244-215A | SMC ChillerINR-244-215A | SMC Chiller

Download Datasheet

INR-244-215A SMC Chiller

Features

  • Pump replaced
  • Replace hoses
  • Replace water
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

INR-244-117A | SMC ChillerINR-244-117A | SMC Chiller

Download Datasheet

INR-244-217A SMC Chiller

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

INR-244-117C | SMC ChillerINR-244-117C | SMC Chiller

Download Datasheet

INR-244-217C SMC Chiller

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

INR-244-112 | SMC ChillerINR-244-112 | SMC Chiller

Download Datasheet

INR-244-112 SMC Chiller

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

INR-244-117B | SMC ChillerINR-244-117B | SMC Chiller

Download Datasheet

INR-244-117B SMC Chiller

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

INR-244-602A | SMC ChillerINR-244-602A | SMC Chiller

Download Datasheet

INR-244-602A | SMC Chiller

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

242-027-0142 | Electrocraft E242 Servo Motor242-027-0142 | Electrocraft E242 Servo Motor

Download Datasheet

242-027-0142 | Electrocraft E242 Servo Motor

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

0190-14344W-R | NSK Motor & Controller Set Service0190-14344W-R | NSK Motor & Controller Set Service

Download Datasheet

0190-14344W-R | NSK Motor & Controller Set Service

Features

  • Disassemble the NSK Motor.
  • All internal parts including windings, contacts, bearing clamp and rotor are inspected for damage or physical wear.
  • Motor is cleaned of any old broken down grease or metal debris from the old failed bearing.
  • Install new connectors, seals and bearings with OEM grease.
  • Disassemble the Controller.
  • Full visual inspection is done.
  • Replace any defective parts.
  • Change all electrolytic capacitors.
  • Repair solder connections and reflow solder as required.
  • Mate power supply to logic board and test basic fault circuits.
  • Bench test drive the drive modules and check output phasing.
  • Reassemble drive and bench test.
  • Check fault circuits and communications.
  • Tune controller to motor and complete final motor test.
  • Reset internal switches to customer settings.
  • Please see our “Product Categories” for custom cases to protect your NSK Motor & Controller.

0190-14344-R | NSK Motor & Controller Set Service0190-14344-R | NSK Motor & Controller Set Service

Download Datasheet

0190-14344-R | NSK Motor & Controller Set Service

Features

  • Disassemble the NSK Motor.
  • All internal parts including windings, contacts, bearing clamp and rotor are inspected for damage or physical wear.
  • Motor is cleaned of any old broken down grease or metal debris from the old failed bearing.
  • Install new connectors, seals and bearings with OEM grease.
  • Disassemble the Controller.
  • Full visual inspection is done.
  • Replace any defective parts.
  • Change all electrolytic capacitors.
  • Repair solder connections and reflow solder as required.
  • Mate power supply to logic board and test basic fault circuits.
  • Bench test drive the drive modules and check output phasing.
  • Reassemble drive and bench test.
  • Check fault circuits and communications.
  • Tune controller to motor and complete final motor test.
  • Reset internal switches to customer settings.
  • Please see our “Product Categories” for custom cases to protect your NSK Motor & Controller.

R88M-U75030VA-S1 | OMRON AC Servo MotorR88M-U75030VA-S1 | OMRON AC Servo Motor

Download Datasheet

R88M-U75030VA-S1 | OMRON AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

HC-MF23G1-UE | Mitsubishi AC Servo MotorHC-MF23G1-UE | Mitsubishi AC Servo Motor

Download Datasheet

HC-MF23G1-UE | Mitsubishi AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

HC-MF43BD-UE | Mitsubishi AC Servo MotorHC-MF43BD-UE | Mitsubishi AC Servo Motor

Download Datasheet

HC-MF43BD-UE | Mitsubishi AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

830003428 | Maxon Servo Motor830003428 | Maxon Servo Motor

Download Datasheet

830003428 | Maxon Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P50B07040DCS00 | Sanyo Denki AC Servo Motor BL Super P5P50B07040DCS00 | Sanyo Denki AC Servo Motor BL Super P5

Download Datasheet

P50B07040DCS00 | Sanyo Denki AC Servo Motor BL Super P5

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P10B13100BCS23 | Sanyo Denki AC Servo MotorP10B13100BCS23 | Sanyo Denki AC Servo Motor

Download Datasheet

P10B13100BCS23 | Sanyo Denki AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P50B03003DXS00 | Sanyo Denki AC Servo MotorP50B03003DXS00 | Sanyo Denki AC Servo Motor

Download Datasheet

P50B03003DXS00 | Sanyo Denki AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P50B05005DXS00 | Sanyo Denki AC Servo MotorP50B05005DXS00 | Sanyo Denki AC Servo Motor

Download Datasheet

P50B05005DXS00 | Sanyo Denki AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P50B05010DCS00 | Sanyo Denki AC Servo MotorP50B05010DCS00 | Sanyo Denki AC Servo Motor

Download Datasheet

P50B05010DCS00 | Sanyo Denki AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMS-20A6AB | Yaskawa AC Servo MotorSGMS-20A6AB | Yaskawa AC Servo Motor

Download Datasheet

SGMS-20A6AB | Yaskawa AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

HC-MF23BG1D-UE | Mitsubishi AC Servo MotorHC-MF23BG1D-UE | Mitsubishi AC Servo Motor

Download Datasheet

HC-MF23BG1D-UE | Mitsubishi AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

R02SAKOE UTOPI-200SE | Yaskawa Minertia DC Servo MotorR02SAKOE UTOPI-200SE | Yaskawa Minertia DC Servo Motor

Download Datasheet

R02SAKOE UTOPI-200SE | Yaskawa Minertia DC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMAH-01AAAP18 | Yaskawa AC Servo MotorSGMAH-01AAAP18 | Yaskawa AC Servo Motor

Download Datasheet

SGMAH-01AAAP18 | Yaskawa AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMAH-01AAF41 | Yaskawa AC Servo MotorSGMAH-01AAF41 | Yaskawa AC Servo Motor

Download Datasheet

SGMAH-01AAF41 | Yaskawa AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

HC-MF23BK-UE | Mitsubishi AC Servo MotorHC-MF23BK-UE | Mitsubishi AC Servo Motor

Download Datasheet

HC-MF23BK-UE | Mitsubishi AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMS-50A6AB | Yaskawa AC Servo MotorSGMS-50A6AB | Yaskawa AC Servo Motor

Download Datasheet

SGMS-50A6AB | Yaskawa AC Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P50B05010DCL68 | Sanyo Denki Servo MotorP50B05010DCL68 | Sanyo Denki Servo Motor

Download Datasheet

P50B05010DCL68 | Sanyo Denki Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMPH-04AAE41D | Yaskawa Servo MotorSGMPH-04AAE41D | Yaskawa Servo Motor

Download Datasheet

SGMPH-04AAE41D | Yaskawa Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMP-02U314M | Yaskawa Servo MotorSGMP-02U314M | Yaskawa Servo Motor

Download Datasheet

SGMP-02U314M | Yaskawa Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGM-02A3YB11 | Yaskawa Servo MotorSGM-02A3YB11 | Yaskawa Servo Motor

Download Datasheet

SGM-02A3YB11 | Yaskawa Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGM-02U3B4L | Yaskawa Servo MotorSGM-02U3B4L | Yaskawa Servo Motor

Download Datasheet

SGM-02U3B4L | Yaskawa Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

P60B18750RXS00M | Sanyo Denki Servo MotorP60B18750RXS00M | Sanyo Denki Servo Motor

Download Datasheet

P60B18750RXS00M | Sanyo Denki Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGMP-01U314M | Yaskawa Servo MotorSGMP-01U314M | Yaskawa Servo Motor

Download Datasheet

SGMP-01U314M | Yaskawa Servo Motor

 

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

1080-00036 | NSK Motor Service1080-00036 | NSK Motor Service

Download Datasheet

1080-00036| NSK Motor Service

Features

  • Disassemble the NSK Motor.
  • All internal parts including windings, contacts, bearing clamp and rotor are inspected for damage or physical wear.
  • Motor is cleaned of any old broken down grease or metal debris from the old failed bearing.
  • Install new connectors, seals and bearings with OEM grease.
  • Tune controller to motor and complete final motor test.

RZ0810FN507 | NSK Motor ServiceRZ0810FN507 | NSK Motor Service

Download Datasheet

RZ0810FN507| NSK Motor Service

Features

  • Disassemble the NSK Motor.
  • All internal parts including windings, contacts, bearing clamp and rotor are inspected for damage or physical wear.
  • Motor is cleaned of any old broken down grease or metal debris from the old failed bearing.
  • Install new connectors, seals and bearings with OEM grease.
  • Tune controller to motor and complete final motor test.

EP0810AF5-05 | NSK ControllerEP0810AF5-05 | NSK Controller

Download Datasheet

EP0810AF5-05 | NSK Controller

Features

  • Disassemble the Controller.
  • Full visual inspection is done.
  • Replace any defective parts.
  • Change all electrolytic capacitors.
  • Repair solder connections and reflow solder as required.
  • Mate power supply to logic board and test basic fault circuits.
  • Bench test drive the drive modules and check output phasing.
  • Reassemble drive and bench test.
  • Check fault circuits and communications.
  • Tune controller to motor and complete final motor test.
  • Reset internal switches to customer settings.

EP0810AF8-05 | NSK ControllerEP0810AF8-05 | NSK Controller

Download Datasheet

EP0810AF8-05 | NSK Controller

Features

  • Disassemble the Controller.
  • Full visual inspection is done.
  • Replace any defective parts.
  • Change all electrolytic capacitors.
  • Repair solder connections and reflow solder as required.
  • Mate power supply to logic board and test basic fault circuits.
  • Bench test drive the drive modules and check output phasing.
  • Reassemble drive and bench test.
  • Check fault circuits and communications.
  • Tune controller to motor and complete final motor test.
  • Reset internal switches to customer settings.

DR303AE9MA| Ametek Rotron Regenerative BlowerDR303AE9MA| Ametek Rotron Regenerative Blower

Download Datasheet

DR303AE9MA| Ametek Rotron Regenerative Blower

Features

  • Replace bearings
  • Visual Inspection of Stator and Rotor
  • Starter cap dielectric isolation components replaced
  • Tap/Rethread damaged bolt holes
  • Repair stripped holes and insert helicoils
  • Post repair electrical operation/functional test
  • Electro mechanical operational verification

810-017086-018 | ESC Power Supply810-017086-018 | ESC Power Supply

Download Datasheet

810-017086-018 | ESC Power Supply

Features

  • Visual inspection of PCB
  • Initial bench testing assessment
  • Standard electronic components replaced as follows:
  • *Fuses
  • *Mechanical Relays
  • *Zener diodes
  • *Resistors
  • *OP amplifiers
  • *Capacitors
  • Output voltage calibrated
  • Post repair electrical functionality and operational test

810-017086-007 | ESC Power Supply810-017086-007 | ESC Power Supply

Download Datasheet

810-017086-007 | ESC Power Supply

Features

  • Visual inspection of PCB
  • Initial bench testing assessment
  • Standard electronic components replaced as follows:
  • *Fuses
  • *Mechanical Relays
  • *Zener diodes
  • *Resistors
  • *OP amplifiers
  • *Capacitors
  • Output voltage calibrated
  • Post repair electrical functionality and operational test

810-017086-008 | ESC Power Supply810-017086-008 | ESC Power Supply

Download Datasheet

810-017086-008 | ESC Power Supply

Features

  • Visual inspection of PCB
  • Initial bench testing assessment
  • Standard electronic components replaced as follows:
  • *Fuses
  • *Mechanical Relays
  • *Zener diodes
  • *Resistors
  • *OP amplifiers
  • *Capacitors
  • Output voltage calibrated
  • Post repair electrical functionality and operational test

810-017086-010 | ESC Power Supply810-017086-010 | ESC Power Supply

Download Datasheet

810-017086-010 | ESC Power Supply

Features

  • Visual inspection of PCB
  • Initial bench testing assessment
  • Standard electronic components replaced as follows:
  • *Fuses
  • *Mechanical Relays
  • *Zener diodes
  • *Resistors
  • *OP amplifiers
  • *Capacitors
  • Output voltage calibrated
  • Post repair electrical functionality and operational test

810-370182-001 | Lam Research Assembly, PCB, ESC Power Supply, DTRBD810-370182-001 | Lam Research Assembly, PCB, ESC Power Supply, DTRBD

Download Datasheet

810-370182-001 | Lam Research Assembly, PCB, ESC Power Supply, DTRBD

Features

  • Visual inspection of PCB
  • Initial bench testing assessment
  • Standard electronic components replaced as follows:
  • *Fuses
  • *Mechanical Relays
  • *Zener diodes
  • *Resistors
  • *OP amplifiers
  • *Capacitors
  • Output voltage calibrated
  • Post repair electrical functionality and operational test

683-24562 | MKS Throttle Valve683-24562 | MKS Throttle Valve

Download Datasheet

683-24562 | MKS Throttle Valve

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

253B-24836 | MKS Throttle Valve253B-24836 | MKS Throttle Valve

Download Datasheet

253B-24836 | MKS Throttle Valve

 

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

153D-15006 | MKS Throttle Valve153D-15006 | MKS Throttle Valve

Download Datasheet

153D-15006 | MKS Throttle Valve

 

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

253B-1-40-1 | MKS Throttle Valve253B-1-40-1 | MKS Throttle Valve

Download Datasheet

253B-1-40-1 | MKS Throttle Valve

 

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

153D-2-50-2 | MKS Throttle Valve153D-2-50-2 | MKS Throttle Valve

Download Datasheet

153D-2-50-2 | MKS Throttle Valve

 

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

153D-12018 | MKS Throttle Valve153D-12018 | MKS Throttle Valve

Download Datasheet

153D-12018 | MKS Throttle Valve

 

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

283152 | MKS Throttle Valve283152 | MKS Throttle Valve

Download Datasheet

283152 | MKS Throttle Valve

 

Features

  • Replace and rewire motor
  • Replace o’ring seals
  • Replace bearings
  • Replace throttle valve cam and bushings
  • Replace valve lever
  • Replace springs
  • Replace limit switches
  • Helium leak tested
  • Manual and automatic pressure control function testing ranging from 0.5 Torr – 10 Torr

B65351000 | GVI 100P Edwards Isolation ValveB65351000 | GVI 100P Edwards Isolation Valve

Download Datasheet

B65351000 | GVI 100P Edwards Isolation Valve

Features

  • Decontamination cleaning
  • O’Rings replaced
  • Lubrication of lead screw and turn handle mechanics
  • Bearings, guide wheels cleaned and replaced as needed
  • Washers/spacers replaced
  • Valve reassembled to OEM specifications
  • Bellows replaced as needed
  • Helium Leak Check
  • Compression plate rebuilt when necessary

B65401000 | GVI 160M Edwards Isolation ValveB65401000 | GVI 160M Edwards Isolation Valve

Download Datasheet

B65401000 | GVI 160M Edwards Isolation Valve

Features

  • Decontamination cleaning
  • O’Rings replaced
  • Lubrication of lead screw and turn handle mechanics
  • Bearings, guide wheels cleaned and replaced as needed
  • Washers/spacers replaced
  • Valve reassembled to OEM specifications
  • Bellows replaced as needed
  • Helium Leak Check
  • Compression plate rebuilt when necessary

B65301000 | GVI 100M Edwards Isolation ValveB65301000 | GVI 100M Edwards Isolation Valve

Download Datasheet

B65301000 | GVI 100M Edwards Isolation Valve

Features

  • Decontamination cleaning
  • O’Rings replaced
  • Lubrication of lead screw and turn handle mechanics
  • Bearings, guide wheels cleaned and replaced as needed
  • Washers/spacers replaced
  • Valve reassembled to OEM specifications
  • Bellows replaced as needed
  • Helium Leak Check
  • Compression plate rebuilt when necessary

09140-PE01 | VAT Gate Valve Manual09140-PE01 | VAT Gate Valve Manual

Download Datasheet

09140-PE01 | VAT Gate Valve Manual

Features

  • Decontamination cleaning
  • O’Rings replaced
  • Lubrication of lead screw and turn handle mechanics
  • Bearings, guide wheels cleaned and replaced as needed
  • Washers/spacers replaced
  • Valve reassembled to OEM specifications
  • Bellows replaced as needed
  • Helium Leak Check
  • Compression plate rebuilt when necessary
  • Use OEM parts to rebuild and refurbish valve

02-177392-00 | Novellus Platen Rebuild02-177392-00 | Novellus Platen Rebuild

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02-177392-00 | Novellus Platen Rebuild

Features

  • Break down Platen
  • Remove screws and clean disassembled parts
  • Tap all screw holes
  • Replace all screws
  • Replace o’rings and pins
  • Reassemble Platen

0750-700176 | Novellus 676 Main Cylinder Assembly0750-700176 | Novellus 676 Main Cylinder Assembly

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0750-700176 | Novellus 676 Main Cylinder Assembly

Features

  • Break down cylinder
  • Clean all parts
  • Remove old grease
  • Replace o’rings and seals
  • Re-grease o’rings and seals
  • Build up cylinder and leak test to specifications

0750-111515 | Novellus Momentum Main Cylinder Assembly0750-111515 | Novellus Momentum Main Cylinder Assembly

Download Datasheet

0750-111515 | Novellus Momentum Main Cylinder Assembly

Features

  • Break down cylinder
  • Clean all parts and remove old grease
  • Replace all seals and o’rings
  • Re-grease o’rings, seals and parts
  • Reassemble cylinder
  • Leak test assembly to meet specifications

853-250001-121 | LAM Research RF Mini-Match853-250001-121 | LAM Research RF Mini-Match

Download Datasheet

853-250001-121 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-250001-024 | LAM Research RF Mini-Match853-250001-024 | LAM Research RF Mini-Match

Download Datasheet

853-250001-024 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-250001-023 | Lam Research RF Mini-Match (ASSY, RF MATCH, ESC PK D)853-250001-023 | Lam Research RF Mini-Match (ASSY, RF MATCH, ESC PK D)

Download Datasheet

853-250001-023 | Lam Research RF Mini-Match (ASSY, RF MATCH, ESC PK D)

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-250001-021 | LAM Research RF Mini-Match853-250001-021 | LAM Research RF Mini-Match

Download Datasheet

853-250001-021 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-330951-001 | LAM Research RF Mini-Match853-330951-001 | LAM Research RF Mini-Match

Download Datasheet

853-330951-001 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-503| LAM Research RF Mini-Match853-015130-503| LAM Research RF Mini-Match

Download Datasheet

853-015130-503| LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-330951-021 | LAM Research RF Mini-Match853-330951-021 | LAM Research RF Mini-Match

Download Datasheet

853-330951-021 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-025083-022 | LAM Research RF Mini-Match853-025083-022 | LAM Research RF Mini-Match

Download Datasheet

853-025083-022 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-025083-003 | LAM Research RF Mini-Match853-025083-003 | LAM Research RF Mini-Match

Download Datasheet

853-025083-003 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-025083-004 | LAM Research RF Mini-Match853-025083-004 | LAM Research RF Mini-Match

Download Datasheet

853-025083-004 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-025083-002 | LAM Research RF Mini-Match853-025083-002 | LAM Research RF Mini-Match

Download Datasheet

853-025083-002 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-025083-001 | LAM Research RF Mini-Match853-025083-001 | LAM Research RF Mini-Match

Download Datasheet

853-025083-001 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-205| LAM Research RF Mini-Match853-015130-205| LAM Research RF Mini-Match

Download Datasheet

853-015130-205| LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-204 | LAM Research RF Mini-Match853-015130-204 | LAM Research RF Mini-Match

Download Datasheet

853-015130-204| LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-202 | LAM Research RF Mini-Match853-015130-202 | LAM Research RF Mini-Match

Download Datasheet

853-015130-202 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-103 | LAM Research RF Mini-Match853-015130-103 | LAM Research RF Mini-Match

Download Datasheet

853-015130-103 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-102 | LAM Research RF Mini-Match853-015130-102 | LAM Research RF Mini-Match

Download Datasheet

853-015130-102 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-006 | LAM Research RF Mini-Match853-015130-006 | LAM Research RF Mini-Match

Download Datasheet

853-015130-006 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-003 | LAM Research RF Mini-Match853-015130-003 | LAM Research RF Mini-Match

Download Datasheet

853-015130-003 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-004 | LAM Research RF Mini-Match853-015130-004 | LAM Research RF Mini-Match

Download Datasheet

853-015130-004 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

853-015130-002 | LAM Research RF Mini-Match853-015130-002 | LAM Research RF Mini-Match

Download Datasheet

853-015130-002 | LAM Research RF Mini-Match

Features

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • New hex mounting screws
  • Replace gears as required
  • New grounding wires
  • Test and calibrate RF peak detect board
  • Full functionality tested on an actual LAM Rainbow tool.
    • Verify RF Plasma is confined with zero watts reflected power
    • Back side helium@ 10T pressure
    • Communication to tool is verified

SGM-04UWB4L | Yaskawa AC Servo MotorSGM-04UWB4L | Yaskawa AC Servo Motor

Download Datasheet

SGM-04UWB4L | Yaskawa AC Servo Motor

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

SGM-01U3AP01 | Yaskawa AC Servo MotorSGM-01U3AP01 | Yaskawa AC Servo Motor

Download Datasheet

SGM-01U3AP01 | Yaskawa AC Servo Motor

Features

  • Visual inspection of Servo Motor.
  • Rotate the shaft forward and reverse.
  • Meg the motor.
  • Use Mitchell Electronic test equipment to check the alignment of the feedback, perform a KE test and check the function of feedback including resolver angles, encoder and tach voltages.
  • If encoder is damaged it is then replaced with a new encoder.
  • Disassemble and clean the Servo Motor.
  • Perform the surge and hipot test.
  • Reassemble Servo Motor.
  • Replace bearings and seals.
  • Align feedback
  • Perform final bench test on our test equipment.

GENMARKS GB4 Series RepairGENMARKS GB4 Series Repair

Download Datasheet

GENMARKS GB4 Series Repair

Features

  • Analysis of Failure cause – (Visual/Functional Inspection)
  • Disassembling – Disassemble Components (Motor, Bearing, Sensor, Belt, Valve, Shaft, Pulley)
  • Repair – Cleaning, Parts Replacement
  • Assembly – Assemble Motor and Parts
  • Test – Cycle, Functional Test, Pulley Test, Vacuum Leak Test
  • Final Inspection – Robot Calibration Parameters, Repeatability Test, Mechanical Test, Solenoid Valve Test

20705 | MKS Thin Film Novellus CVD 300mm IREPD Refurbishment20705 | MKS Thin Film Novellus CVD 300mm IREPD Refurbishment

Download Datasheet

20705 | MKS Thin Film Novellus CVD 300mm IREPD Refurbishment

Features

Replace or repair

  • Infrared Source
  • Window
  • O-ring
  • Detector
  • Reflective Object Sensor
  • Motor
  • Gear
  • DC-DC converters
  • Detector Board
  • Control Board

Re-zero Test

Final Test

  • Helium leak test (<5.0e-09)
  • Signal 1X (voltage)(0.06~0.14)
  • Signal 20X(voltage)(0.2~1.8)
  • Motor LED Test
  • Source LED Test

Item

  • Accessories Check
  • Final visual check
  • Packing

 

300MM AMAT LK Spindle Refurbishment300MM AMAT LK Spindle Refurbishment

Download Datasheet

300MM AMAT LK Spindle Refurbishment

Features

General Process Flow

 

Repair

  • Disassembling
  • Clean & Refurbish
  • Replace Parts
  • Assembly

Function Test

  • Rotation
  • UP/Down Function Test
  • Sweep Function Test
  • Rotation Function Test

Q.C

  • Final Q.C
  • Cleaning & Packaging
  • Ready for Shipment

 

ROTARY UNION ASSEMBLY OVERHAUL PROGRAMROTARY UNION ASSEMBLY OVERHAUL PROGRAM

Download Datasheet

ROTARY UNION ASSEMBLY OVERHAUL PROGRAM

Features

Receiving

  • S/N Check
  • Warranty Check
  • Visual & Preliminary Check
  • Take Photo

Repair

  • Dismantling
  • Cleaning (Graphite lapping and polishing)
  • Replace Parts (New bearings, o’rings and seals)
  • Assembly

Function Test

  • Dynamic Pressure Check
  • Static Pressure Check
  • Leak Check

 

853-012123-001 Lam Research Harmonic Drive - Quick Exchange Option and Repair853-012123-001 Lam Research Harmonic Drive – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-032776-002 Lam Research Paddle Lifter - Quick Exchange Option and Repair853-032776-002 Lam Research Paddle Lifter – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Lam Research Standalone 4520i & 9600 platforms.

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam machine

853-032776-001 Lam Research Paddle Lifter - Quick Exchange Option and Repair853-032776-001 Lam Research Paddle Lifter – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Paddle Lifter cycles the heated paddle up & down with precision accuracy.

Applications Include:

All Rainbow Standalone 4520i & 9600 Platforms.

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam Machine

853-012200-002 Lam Research Gate Drive Inner Assembly - Quick Exchange Option and Repair853-012200-002 Lam Research Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-021924-003 Lam Research Paddle Lifter - Quick Exchange Option and Repair853-021924-003 Lam Research Paddle Lifter – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Lam Research Standalone 4520i & 9600 Platforms.

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam machine

853-032776-605 Lam Research Paddle Lifter - Quick Exchange Option and Repair853-032776-605 Lam Research Paddle Lifter – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Paddle Lifter cycles the heated paddle up & down with precision.

Applications Include:

All Rainbow Standalone 4520i & 9600 platforms

Features

  • New Bellows Assembly
  • New Silicon Bronze Linear Adjust Screw
  • New Stepper Motor
  • New Linear & Thrust Bearings
  • New Thrust Washers
  • New D-Sub or Viking Connectors
  • Fully Disassembled
  • All Parts Cleaned and Re-anodized as needed
  • Helium Leak Tested
  • Full Functionality Tested on an actual Lam machine

853-012175-004 Lam Research Harmonic Drive - Quick Exchange Option and Repair853-012175-004 Lam Research Harmonic Drive – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-003 Lam Research Harmonic Drive - Quick Exchange Option and Repair853-012175-003 Lam Research Harmonic Drive – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-002 Lam Research Harmonic Drive - Quick Exchange Option and Repair853-012175-002 Lam Research Harmonic Drive – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012175-001 Lam Research Harmonic Drive - Quick Exchange Option and Repair853-012175-001 Lam Research Harmonic Drive – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-012123-004 | Lam Research Harmonic Drive - Quick Exchange Option and Repair853-012123-004 | Lam Research Harmonic Drive – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • New Belts
  • New Bearings
  • New Quad Seals
  • New O-rings
  • New Sensors
  • New Stepper Motors
  • New Connectors (Metal or Viking)
  • New Wiring
  • New Pins
  • Custom Labeled
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)

New Harmonic Core Replacement

853-001198-001 AutoEtch Outer Gate Assembly - Quick Exchange Option and Repair853-001198-001 AutoEtch Outer Gate Assembly – Quick Exchange Option and Repair

Download Datasheet

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

 

  • Brand New Gates Available
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

853-001198-002 AutoEtch Inner Gate Assembly - Quick Exchange Option and Repair853-001198-002 AutoEtch Inner Gate Assembly – Quick Exchange Option and Repair

Download Datasheet

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

  • Brand New Gates
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

SG660-007612-001 | Semigroup** New** Drop in replacement (Engineered by Semigroup) for Lam Research Power Supply 660-007612-001, 24 Volt DC 40 AmpSG660-007612-001 | Semigroup** New** Drop in replacement (Engineered by Semigroup) for Lam Research Power Supply 660-007612-001, 24 Volt DC 40 Amp

Download Datasheet

Semigroup** New** Drop in replacement (Engineered by Semigroup) for Lam Research Power Supply 660-007612-001, 24 Volt DC 40 Amp

Features

  • Mounting bracket installed on Power Supply
  • All wire connections are compatible with Lam tools
  • Voltage inhibit works with Lam 24 Volt actuator switch
  • EC Certification included
  • Red and Black Terminals for easy installation
  • Full Functionality Test on Actual Lam Tool -001 AC/DC Box

09140-PE01-BO | VAT Gate Valve Manual09140-PE01-BO | VAT Gate Valve Manual

Download Datasheet

09140-PE01 | VAT Gate Valve Manual

Features

  • Decontamination cleaning
  • O’Rings replaced
  • Lubrication of lead screw and turn handle mechanics
  • Bearings, guide wheels cleaned and replaced as needed
  • Washers/spacers replaced
  • Valve reassembled to OEM specifications
  • Bellows replaced as needed
  • Helium Leak Check
  • Compression plate rebuilt when necessary
  • Use OEM parts to rebuild and refurbish valve

SG-DR303AE9MA| Semigroup Drop in Replacement for Ametek Rotron Regenerative BlowerSG-DR303AE9MA| Semigroup Drop in Replacement for Ametek Rotron Regenerative Blower

Download Datasheet

DR303AE9MA| Ametek Rotron Regenerative Blower

Features

  • Replace bearings
  • Visual Inspection of Stator and Rotor
  • Starter cap dielectric isolation components replaced
  • Tap/Rethread damaged bolt holes
  • Repair stripped holes and insert helicoils
  • Post repair electrical operation/functional test
  • Electro mechanical operational verification

853-012500-002| Edge Sensor Assembly - Quick Exchange Option and Repair853-012500-002| Edge Sensor Assembly – Quick Exchange Option and Repair

Download Datasheet

Edge Sensor Assembly

Features

  • New Fiber Optic Amplifier
  • New Fiber Optics X 2
  • New Stepper Motor
  • New Viking or Misumi Connectors
  • Fully Disaasemble
  • All Parts Cleaned
  • Full Functionality Tested on actual Lam Machine
  • New Opto isolator

853-012500-003 | Edge Sensor Assembly - Quick Exchange Option and Repair853-012500-003 | Edge Sensor Assembly – Quick Exchange Option and Repair

Download Datasheet

Edge Sensor Assembly

Features

  • New Fiber Optic Amplifier
  • New Fiber Optics X 2
  • New Stepper Motor
  • New Viking or Misumi Connectors
  • Fully Disaasemble
  • All Parts Cleaned
  • Full Functionality Tested on actual Lam Machine
  • New Opto isolator

INR-244-117A | SMC Chiller - Quick Exchange Option and RepairINR-244-117A | SMC Chiller – Quick Exchange Option and Repair

Download Datasheet

INR-244-217A SMC Chiller

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

852-011060-001 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) - Quick Exchange Option and Repair852-011060-001 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) – Quick Exchange Option and Repair

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

853-012100-003 Lam Research Arm Housing Assembly - Quick Exchange Option and Repair853-012100-003 Lam Research Arm Housing Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Arm Housing Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Bearings
  • New Screws
  • New Spindle As Needed
  • New Extension Spring As Needed
  • New Drive Cable As Needed
  • Arm Housing Cover Helium Leak Checked
  • Full Functionality Tested on an Actual Lam Rainbow Tool for Parallelism & Repeatability

853-012100-004 Lam Research Arm Housing Assembly - Quick Exchange Option and Repair853-012100-004 Lam Research Arm Housing Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Arm Housing Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Bearings
  • New Screws
  • New Spindle As Needed
  • New Extension Spring As Needed
  • New Drive Cable As Needed
  • Arm Housing Cover Helium Leak Checked
  • Full Functionality Tested on an Actual Lam Rainbow Tool for Parallelism & Repeatability

853-012100-001 Lam Research Arm Housing Assembly - Quick Exchange Option and Repair853-012100-001 Lam Research Arm Housing Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Arm Housing Assembly provides highly reliable and repeatable wafer placement.

Applications Include:

All Rainbow Standalone Platforms

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Bearings
  • New Screws
  • New Spindle As Needed
  • New Extension Spring As Needed
  • New Drive Cable As Needed
  • Arm Housing Cover Helium Leak Checked
  • Full Functionality Tested on an Actual Lam Rainbow Tool for Parallelism & Repeatability

853-442078-001 Lam Research Gate Drive Inner Assembly - Quick Exchange Option and Repair853-442078-001 Lam Research Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-442064-002 LAM Research Gate Drive Inner Assembly - Quick Exchange Option and Repair853-442064-002 LAM Research Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012200-004 Lam Research 9600 Gate Drive Inner Assembly - Quick Exchange Option and Repair853-012200-004 Lam Research 9600 Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012261-001 Lam Research Gate Drive Inner Assembly - Quick Exchange Option and Repair853-012261-001 Lam Research Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012875-001 Lam Research Gate Drive Inner Assembly - Quick Exchange Option and Repair853-012875-001 Lam Research Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool
  • ***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

853-012875-002 Lam Research 9600 Gate Drive Inner Assembly - Quick Exchange Option and Repair853-012875-002 Lam Research 9600 Gate Drive Inner Assembly – Quick Exchange Option and Repair

Download Datasheet

The Lam Research Gate Drive Inner Assembly is used on All Rainbow Standalone Platforms as well as some Alliance Multi-Chamber Platforms.

The Lam Research Gate Drive Inner Assembly cycles up & down with precision accuracy isolating the main chamber from the load locks, it also provides a vacuum tight seal for process etch isolation and safe wafer transport.

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New Sensors
  • New Pneumatic Air Cylinders
  • New Pneumatic Air Fittings
  • New Pneumatic Air Lines
  • New Cam Followers
  • New Bumpers for Link
  • Labeled
  • Over-lock Adjustment
  • Flag Interrupt Adjustment
  • Full Functionality Tested on an Actual Lam Rainbow Tool

***Gate Drive Link Replaced or Upgraded with Newer Robust Version as Needed***

STP-A2203 | Boc Edwards Seiko Seiki Turbo PumpSTP-A2203 | Boc Edwards Seiko Seiki Turbo Pump

Download Datasheet

STP-A2203 | Boc Edwards Seiko Seiki Turbo Pump

 

Features

  1. Incoming Inspection – Incoming Evaluation and Failure Analysis is completed
  2. Initiate Condition Report
  3. Decontamination/Cleaning – Pump is disassembled and decontaminated utilizing enclosed aqueous based cleaning system, Post Clean Rinse, Component Moisture Bake out
  4. Re-coating as required
  5. Precision Balancing
  6. Final Clean
  7. Reassembly – Parts are Final cleaned, inspected and staged for assembly, consumable are replaced and each pump is reassembled utilizing a predefined Engineering Master and work instructions by a certified technician
  8. Extensive Testing – All Turbo Pumps are leak checked and tested for proper functionality following a defined test procedure
  9. Vibration Analysis
  10. He Leak Testing
  11. Condition Report Completion – Failure Analysis – The final findings and probable cause are inputted into a Failure Analysis report and is routed to management for review and approval
  12. QA and Packaging

STP-A803 | Boc Edwards Seiko Seiki Turbo PumpSTP-A803 | Boc Edwards Seiko Seiki Turbo Pump

Download Datasheet

STP-A803 | Boc Edwards Seiko Seiki Turbo Pump

 

Features

  1. Incoming Inspection – Incoming Evaluation and Failure Analysis is completed
  2. Initiate Condition Report
  3. Decontamination/Cleaning – Pump is disassembled and decontaminated utilizing enclosed aqueous based cleaning system, Post Clean Rinse, Component Moisture Bake out
  4. Re-coating as required
  5. Precision Balancing
  6. Final Clean
  7. Reassembly – Parts are Final cleaned, inspected and staged for assembly, consumable are replaced and each pump is reassembled utilizing a predefined Engineering Master and work instructions by a certified technician
  8. Extensive Testing – All Turbo Pumps are leak checked and tested for proper functionality following a defined test procedure
  9. Vibration Analysis
  10. He Leak Testing
  11. Condition Report Completion – Failure Analysis – The final findings and probable cause are inputted into a Failure Analysis report and is routed to management for review and approval
  12. QA and Packaging

STP-603 | Boc Edwards Seiko Seiki Turbo PumpSTP-603 | Boc Edwards Seiko Seiki Turbo Pump

Download Datasheet

STP-603 | Boc Edwards Seiko Seiki Turbo Pump

 

Features

  1. Incoming Inspection – Incoming Evaluation and Failure Analysis is completed
  2. Initiate Condition Report
  3. Decontamination/Cleaning – Pump is disassembled and decontaminated utilizing enclosed aqueous based cleaning system, Post Clean Rinse, Component Moisture Bake out
  4. Re-coating as required
  5. Precision Balancing
  6. Final Clean
  7. Reassembly – Parts are Final cleaned, inspected and staged for assembly, consumable are replaced and each pump is reassembled utilizing a predefined Engineering Master and work instructions by a certified technician
  8. Extensive Testing – All Turbo Pumps are leak checked and tested for proper functionality following a defined test procedure
  9. Vibration Analysis
  10. He Leak Testing
  11. Condition Report Completion – Failure Analysis – The final findings and probable cause are inputted into a Failure Analysis report and is routed to management for review and approval
  12. QA and Packaging

Mass Flow Controllers and Liquid Flow MetersMass Flow Controllers and Liquid Flow Meters

Download Datasheet

Mass Flow Controllers and Liquid Flow Meters

Features

Baratron  Capacitance Manometers & Valves

  • All pressure devices are calibrated on automated MKS Vacuum Diagnostic Systems.
  • These systems allow our technicians to test from 10 Mtorr to 5000 Torr with +/- .08% of reading accuracy.
  • Provide a complete service, including sensor and PCB replacement if needed.
  • Re-ranging service for all manometers as well as calibration of pressure controllers and pressure devices is available.
  • Our exacting rebuild process stars with dismantling of each valve, which is subsequently cleaned and inspected.
  • Using a proprietary system purpose built for testing valve functions, Semigroup analyzes motor function.
  • Checks valve positioning, validates leak integrity and tests flapper assembly functions on every valve.
  • Based upon test results each valve is rebuild as needed to conform to manufacture’s specifications.
  • New seal and bearing kit is installed in every valve.
  • Teflon recoating is applied as needed.
  • Prior to packaging, a three phase quality assurance test represents the final phase of our rebuilding process.

853-032190-008 | LAM TCP Upper Match853-032190-008 | LAM TCP Upper Match

Download Datasheet

853-032190-008 | LAM TCP Upper Match

Features

LAM TCP Upper Match

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • Replace gears and limit switches as required
  • Set Capacitors and Vernier Dial to OEM configurations
  • Full Functionality Test on actual LAM 9600 Rainbow tool
  • Verify RF Plasma is confined with zero watts reflected power
  • Communication to tool is verified

853-032190-008 | LAM TCP Upper Match - Quick Exchange Option and Repair853-032190-008 | LAM TCP Upper Match – Quick Exchange Option and Repair

Download Datasheet

853-032190-008 | LAM TCP Upper Match – Quick Exchange Option and Repair

Features

LAM TCP Upper Match – Quick Exchange Option and Repair

  • Fully Disassembled
  • All parts cleaned
  • New Motors
  • New Potentiometers
  • New Capacitors as required
  • All RF Silver-plated components are restored to original specifications
  • Replace gears and limit switches as required
  • Set Capacitors and Vernier Dial to OEM configurations
  • Full Functionality Test on actual LAM 9600 Rainbow tool
  • Verify RF Plasma is confined with zero watts reflected power
  • Communication to tool is verified

853-800089-103 | BIAS Match853-800089-103 | BIAS Match

Download Datasheet

Features

Standard Repair

• Inspect/Test/Refurbish both Vacuum Capacitors
• Inspect/Clean all silver plated parts
• Inspect/Verify Phase/Mag Detector
• Inspect/Verify Water Lines/Hardware
• Inspect/Verify Stepper Motor Assemblies
• Inspect/Verify Motor Coupler & Drive shaft
• Inspect/Verify/Clean Controller PCBA
• Inspect/Verify RF output & dielectric
• Multi point Power/Impedance testing

 

Major Repair

• Replace both Vacuum Capacitors
• Inspect/Clean all silver plated parts
• Inspect/Verify Phase/Mag Detector
• Inspect/Verify Water Lines/Hardware
• Inspect/Verify Stepper Motor Assemblies
• Inspect/Verify Motor Coupler & Drive shaft
• Inspect/Verify/Clean Controller PCBA
• Inspect/Verify RF output & dielectric
• Multi point Power/Impedance testing

249021 | Fusion Gemini 3 – Axis Robot Assembly249021 | Fusion Gemini 3 – Axis Robot Assembly

Download Datasheet

Features

  • New Vertical Bearings
  • New Leadscrew and Ball-nut
  • New Rotation Bearing
  • New Arm Bearings
  • New Coil Cable
  • New Wafer Pan Coil Tubes
  • New Power Off Brake
  • New Emitters
  • Upper Rotation Belt
  • Rotation and Vertical Belts
  • New Opto-isolators
  • New Coil Vacuum Line
  • New Electrical Coiled Cable
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Fusion Tool

     Functionality Checklist

  1. Check Robot Initialization & Home Positioning
  2. Check Repeatability to Left Cassette Platform
  3. Check Repeatability to Right Cassette Platform
  4. Check rotation to both Left & Right Cassette Platforms
  5. Check Repeatability to Chamber(s)
  6. Check repeatability to Left Platform Slot 1, 15 & 25
  7. Check repeatability to Right Platform Slot 1, 15 & 25
  8. Check Repeatability of Left Pan Extend & Retract
  9. Check repeatability of Right Pan Extend & Retract
  10. Wafer Vacuum Check Right Pan
  11. Wafer Vacuum Check Left Pan
  12. Check both Pan Vacuum Levels at Wafer Release and Wafer Clamped
  13. Perform 100 Wafer Marathon

322703 | Eaton Gemini 3 – Axis Robot Assembly322703 | Eaton Gemini 3 – Axis Robot Assembly

Download Datasheet

Features

  • New Vertical Bearings
  • New Leadscrew and Ball-nut
  • New Rotation Bearing
  • New Arm Bearings
  • New Coil Cable
  • New Wafer Pan Coil Tubes
  • New Power Off Brake
  • New Emitters
  • Upper Rotation Belt
  • Rotation and Vertical Belts
  • New Opto-isolators
  • New Coil Vacuum Line
  • New Electrical Coiled Cable
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Fusion Tool

     Functionality Checklist

  1. Check Robot Initialization & Home Positioning
  2. Check Repeatability to Left Cassette Platform
  3. Check Repeatability to Right Cassette Platform
  4. Check rotation to both Left & Right Cassette Platforms
  5. Check Repeatability to Chamber(s)
  6. Check repeatability to Left Platform Slot 1, 15 & 25
  7. Check repeatability to Right Platform Slot 1, 15 & 25
  8. Check Repeatability of Left Pan Extend & Retract
  9. Check repeatability of Right Pan Extend & Retract
  10. Wafer Vacuum Check Right Pan
  11. Wafer Vacuum Check Left Pan
  12. Check both Pan Vacuum Levels at Wafer Release and Wafer Clamped
  13. Perform 100 Wafer Marathon

322703-Z | Axcelis Gemini 3 – Axis Robot Assembly322703-Z | Axcelis Gemini 3 – Axis Robot Assembly

Download Datasheet

Features

  • New Vertical Bearings
  • New Leadscrew and Ball-nut
  • New Rotation Bearing
  • New Arm Bearings
  • New Coil Cable
  • New Wafer Pan Coil Tubes
  • New Power Off Brake
  • New Emitters
  • Upper Rotation Belt
  • Rotation and Vertical Belts
  • New Opto-isolators
  • New Coil Vacuum Line
  • New Electrical Coiled Cable
  • Fully Disassembled
  • All Parts Cleaned
  • Full Functionality Tested on an Actual Fusion Tool 

     Functionality Checklist

  1. Check Robot Initialization & Home Positioning
  2. Check Repeatability to Left Cassette Platform
  3. Check Repeatability to Right Cassette Platform
  4. Check rotation to both Left & Right Cassette Platforms
  5. Check Repeatability to Chamber(s)
  6. Check repeatability to Left Platform Slot 1, 15 & 25
  7. Check repeatability to Right Platform Slot 1, 15 & 25
  8. Check Repeatability of Left Pan Extend & Retract
  9. Check repeatability of Right Pan Extend & Retract
  10. Wafer Vacuum Check Right Pan
  11. Wafer Vacuum Check Left Pan
  12. Check both Pan Vacuum Levels at Wafer Release and Wafer Clamped
  13. Perform 100 Wafer Marathon

SG853-021917-108 | 200mm Isotropic Heated Paddle for LAM 853-021917-108, ASSY,HTD PADDLE, FDTHR, ISO ETCHSG853-021917-108 | 200mm Isotropic Heated Paddle for LAM 853-021917-108, ASSY,HTD PADDLE, FDTHR, ISO ETCH

Download Datasheet

Features

  • Base Material – Aluminum 6061
  • Surface Treated – Clear Anodize
  • Operating Range – 0-120 Deg C
  • Surface Flatness – < 1.0 mil
  • Anodize Thickness – .4 to .6 mil
  • Operating Voltage – 110 VAC
  • Feed Through – Aluminum, RF Filtered, Hermetically Sealed
  • Drop in Replacement – Yes

SG853-021917-008| 200mm Isotropic Heated Paddle LAM 853-021917-008 | ASSY | HTD |PADDLE-FDTHRU | ISO | 8inSG853-021917-008| 200mm Isotropic Heated Paddle LAM 853-021917-008 | ASSY | HTD |PADDLE-FDTHRU | ISO | 8in

Download Datasheet

Features

  • Base Material – Aluminum 6061
  • Surface Treated – Clear Anodize
  • Operating Range – 0-120 Deg C
  • Surface Flatness – < 1.0 mil
  • Anodize Thickness – .4 to .6 mil
  • Operating Voltage – 110 VAC
  • Feed Through – Aluminum, RF Filtered, Hermetically Sealed
  • Drop in Replacement – Yes

0190-09116 | AMAT SMC Thermo Con Chiller Refurbishment0190-09116 | AMAT SMC Thermo Con Chiller Refurbishment

Download Datasheet

0190-09116 | AMAT SMC Thermo Con Chiller Refurbishment

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

INR-244-808-2 | SMC Thermo-Con Chiller RefurbishmentINR-244-808-2 | SMC Thermo-Con Chiller Refurbishment

Download Datasheet

INR-244-808-2 | SMC Thermo-Con Chiller Refurbishment

Features

  • Pump replaced
  • Reseal water tank
  • Replace hoses
  • Replace water lines
  • Rebuild thermo module with new peltiers
  • Replace other parts as needed
  • Run chiller and cycle for temperature and flow control

EXSH01001UNIV | Varian-Agilent SH-100 Dry Scroll Vacuum Pump RefurbishmentEXSH01001UNIV | Varian-Agilent SH-100 Dry Scroll Vacuum Pump Refurbishment

Download Datasheet

Features

Major Rebuild:

  • Completely disassemble the pump module
  • Completely clean all internal parts
  • Install new tip seals and o-rings
  • Install new crank assemblies
  • Remove all old bearings and replace with new bearings
  • Perform bench test
  • All Varian-Agilent SH-100 Dry Scroll Vacuum Pumps are tested to a base pressure of 20 millitorr or less

Standard Rebuild:

  • Completely disassemble the pump module
  • Completely clean all internal parts
  • Pack bearings with high performance vacuum grease
  • Install new tip seals and o-rings
  • Perform bench test
  • All Varian-Agilent SH-100 Dry Scroll Vacuum Pumps are tested to a base pressure of 20 millitorr or less

S716-011564-003 | Lam Research Electrode Upper Graphite SFG - OEM Part 716-011564-003S716-011564-003 | Lam Research Electrode Upper Graphite SFG – OEM Part 716-011564-003

Download Datasheet

Features

  • Particle Size – 1 μm (40 μin)
  • Pore size – 0.3 μm (12 μin)
  • Coefficient of thermal expansion μm/m°C (μin/in°F) –  8.1 (4.5)
  • Compressive Strength – 166 MPa (24,100 psi)
  • Flexural Strength – 96 MPa (13,900 psi)
  • Tensile Strength – 67 MPa (9700 psi)
  • Shore Hardness – 74
  • Electrical Resistivity μΩ-cm (μΩ-in) – 950 (770)
  • Apparent density g/cm³ (lb/in³) – 1.77 (0.064)
  • Thermal conductivity W/m-K (Btu-ft/hr/ft2°F) – 75 (44)
  • Oxidation threshold – 470°C (880°F)

0010-77533 | Applied Materials 200mm MIRRA Titan 1 HEAD0010-77533 | Applied Materials 200mm MIRRA Titan 1 HEAD

Download Datasheet

0010-77533 | Applied Materials 200mm MIRRA Titan 1 HEAD

Features

  • Visual Inspection & Analysis
  • DATA Tracking
  • Decontamination & Cleaning
  • New O- rings
  • New Screws Torqued to Spec.
  • New Sensors & New Spring
  • New Membrane
  • New De-Chuck Bladder
  • New Rolling Diaphragm
  • New Seal Diaphragm
  • New Retaining Wear Ring
  • New Membrane Support Plate Pad
  • Replacement of air lines and air fittings
  • Bore and Gimbal Flexure plate shaft re-lubricated
  • Post rebuild clean
  • Final Visual inspection
  • Final Pressure Test to ensure Functionality

 

 

Semigroup’s Applied Materials 200mm Mirra Titan 1 Head Turnkey Rebuild Service has been perfected over the last 23 years extending head life expectancy and adding value for our clients so they can focus on Moving More High yielding wafers through the FAB!

853-025903-002 | LAM Low Frequency Autotune853-025903-002 | LAM Low Frequency Autotune

Download Datasheet

853-025903-002 | LAM Low Frequency Autotune

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New 10K Potentiometors
  • New Motors
  • New Lead Screw When Needed
  • New High Voltage Wire
  • New Set Screws
  • New Tuning Rods When Needed
  • Set up to OEM Specs
  • Fully Tested on 4520i Lam Tool
  • New Labeling

853-025903-001 | LAM Low Frequency Autotune – Quick Exchange Option and Repair853-025903-001 | LAM Low Frequency Autotune – Quick Exchange Option and Repair

Download Datasheet

853-025903-001 | LAM Low Frequency Autotune – Quick Exchange Option and Repair

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New 10K Potentiometors
  • New Motors
  • New Lead Screw When Needed
  • New High Voltage Wire
  • New Set Screws
  • New Tuning Rods When Needed
  • Set up to OEM Specs
  • Fully Tested on 4520i Lam Tool
  • New Labeling

853-025903-001 | LAM Low Frequency Autotune853-025903-001 | LAM Low Frequency Autotune

Download Datasheet

853-025903-001 | LAM Low Frequency Autotune

Features

  • Fully Disassembled
  • All Parts Cleaned
  • New 10K Potentiometors
  • New Motors
  • New Lead Screw When Needed
  • New High Voltage Wire
  • New Set Screws
  • New Tuning Rods When Needed
  • Set up to OEM Specs
  • Fully Tested on 4520i Lam Tool
  • New Labeling

0190-14344 | NSK Motor & Controller Set Service0190-14344 | NSK Motor & Controller Set Service

Download Datasheet

0190-14344 | NSK Motor & Controller Set Service

Features

  • Disassemble the NSK Motor.
  • All internal parts including windings, contacts, bearing clamp and rotor are inspected for damage or physical wear.
  • Motor is cleaned of any old broken down grease or metal debris from the old failed bearing.
  • Install new connectors, seals and bearings with OEM grease.
  • Disassemble the Controller.
  • Full visual inspection is done.
  • Replace any defective parts.
  • Change all electrolytic capacitors.
  • Repair solder connections and reflow solder as required.
  • Mate power supply to logic board and test basic fault circuits.
  • Bench test drive the drive modules and check output phasing.
  • Reassemble drive and bench test.
  • Check fault circuits and communications.
  • Tune controller to motor and complete final motor test.
  • Reset internal switches to customer settings.
  • Please see our “Product Categories” for custom cases to protect your NSK Motor & Controller.

852-011060-101 | Lam Research Rainbow Assembly Housing Upper Chamber, Low Pressure Oxide - 4852-011060-101 | Lam Research Rainbow Assembly Housing Upper Chamber, Low Pressure Oxide – 4″, 5″, 6″, (Rainbow Gap Drive) Refurbishment

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

852-011060-101 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive), Low Pressure Oxide - 4852-011060-101 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive), Low Pressure Oxide – 4″, 5″, 6″ – Quick Exchange Option and Repair

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

852-011060-108 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive)852-011060-108 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive)

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

852-011060-108 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) - Quick Exchange Option and Repair852-011060-108 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) – Quick Exchange Option and Repair

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

852-011060-101 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive)852-011060-101 | Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive)

Download Datasheet

Lam Research Rainbow Assembly Housing Upper Chamber (Rainbow Gap Drive) provides highly reliable movement under low pressure.

Applications Include:

4400, 4500, 4520, 4520i Rainbow Standalone Platforms

 

Features

  • New Idler Sprockets
  • New Bearings for Idler Sprockets
  • New Bearings for Housing, Gap Adjust
  • New Chain #25
  • New Plate, Bearing Mount (Plate Bearing Mount Stainless Steel Plates are measured for flatness and Replaced if bent or warped).
  • New Shoulder Screws
  • Refurbished Lead Screws (1-Driver and 3-Driven are all refurbished with new internal parts, properly lubricated, including brand new Sprockets).
  • Hard Stops are set up
  • Quad Seal Ring (Cleaned up and sent back with Gap Barrel Housing for easy installation on your Rainbow Tool.
  • Parallelism is checked and set up for minimal adjustment.
  • All final testing is completed on a LAM Research Tool.

02-307391-00 - Novellus & LAM Research Speed Dome 200mm Refurbishment -02-307391-00 – Novellus & LAM Research Speed Dome 200mm Refurbishment –

Download Datasheet

Our Refurbishment Process

The Semigroup dome refurbishment starts with stripping the dome to the bare ceramic, we then vacuum test and check for cracks or chips that could cause premature failure. After the dome passes the first inspections it is sent out for acid clean, DI pressure rinse and then dried, the dome is bead blasted to the standard Ra or a customer requested Ra as low as 60 Ra or up to a 180 Ra finish. The o-ring sealing surface is reworked if needed. The dome is the pressure washed again and then oven dried in a clean room, the inside of the dome is then sealed off from the elements.

At this point the dome becomes the same as a “new” build, every component is replaced with new parts, new copper tubing, new G10, new fittings, new hardware and new elastomer, the dome is tested and must meet all specifications to operate on par with a new dome.

All of Semigroup’s domes are made to operate as a High Power Dome, SG uses G10 to replace fiberglass that is prone to failure, this is done on all the domes new or refurbished.

 

High Quality Refurbishment

Every dome is sealed in 2 nylon clean room bags and shipped in a “new crate” with custom foam inserts.

Serial numbers are logged and tracked for each dome, each crate will have the serial number on the outside of the crate as well as on the inside bag label.

02-10387-01 - Novellus / LAM Research 200mm Speed Dome Refurbishment02-10387-01 – Novellus / LAM Research 200mm Speed Dome Refurbishment

Download Datasheet

Our Refurbishment Process

The Semigroup dome refurbishment starts with stripping the dome to the bare ceramic, we then vacuum test and check for cracks or chips that could cause premature failure. After the dome passes the first inspections it is sent out for acid clean, DI pressure rinse and then dried, the dome is bead blasted to the standard Ra or a customer requested Ra as low as 60 Ra or up to a 180 Ra finish. The o-ring sealing surface is reworked if needed. The dome is the pressure washed again and then oven dried in a clean room, the inside of the dome is then sealed off from the elements.

At this point the dome becomes the same as a “new” build, every component is replaced with new parts, new copper tubing, new G10, new fittings, new hardware and new elastomer, the dome is tested and must meet all specifications to operate on par with a new dome.

All of Semigroup’s domes are made to operate as a High Power Dome, SG uses G10 to replace fiberglass that is prone to failure, this is done on all the domes new or refurbished.

 

High Quality Refurbishment

Every dome is sealed in 2 nylon clean room bags and shipped in a “new crate” with custom foam inserts.

Serial numbers are logged and tracked for each dome, each crate will have the serial number on the outside of the crate as well as on the inside bag label.

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