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Leading Technology

Semigroup is the industry’s premier semiconductor equipment re-manufacturer and service provider. We have a focused approach of providing Lam Research® Plasma Etch Equipment (primarily Single Chamber Platforms) for Metal, Conductor and Dielectric Plasma Etch applications.

Semigroup’s technical expertise assures the highest quality of refurbished equipment available on the after-market. We refurbish these tools to the original equipment manufacturer’s specifications.

We provide turnkey solutions which include the total refurbishment of the specified tool, configured to the end user’s requirements.  All our systems go through the same rigorous testing you would expect from an OEM.  We can then provide installation, warranty support as well as ongoing technical support and periodic preventative maintenance.

Semigroup has a complete line of spares and consumable parts to keep your newly refurbished equipment running at the highest level of efficiency. (Rainbow and Alliance Platforms)

Lam Research® Plasma Etch Equipment

Lam Research® Plasma Etch Equipment (primarily Single Chamber Platforms) for Metal, Conductor and Dielectric Plasma Etch applications.