Description

OEM Part Number 02-336407-00

Novellus / Lam Research 300mm ASSY, Bell Jar, Speed Max Top Cool Dome Refurbishment

6 Month Warranty

The Semigroup dome refurbishment starts with stripping the Dome to the bare ceramics, all hardware, Copper, G10 is discarded, serial number and customer are recorded. The dome is then cleaned and tested for cracks, a visual inspection is also done to make sure there are no chips or excessive wear that could lead to an early failure. The Ceramic is then sent out for bead blast to the correct surface Ra and then cleaned to semiconductor specifications, the sealing surfaced is treated if needed.

At this time the inside of the dome is sealed to begin the build. All new components are used, copper tubing, fittings, hardware, G10 phenolic ribs or rings, along with new elastomers. The dome is vacuum tested and electrically tested for resistivity and impedance to ensure proper function. The dome is then sealed in clean room bags and shipped in a custom foam crate to insure it is protected during transit.

Domes are tracked using the serial numbers located on the ceramic, part number and serial number will be on the crate and on the nylon bag.