Description
OEM Part Number 853-012175-004
LAM Research Harmonic Arm Drive
The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.
Applications Include:
All Rainbow Standalone Platforms
Features
- New Belts
- New Bearings
- New Quad Seals
- New O-rings
- New Sensors
- New Stepper Motors
- New Connectors (Metal or Viking)
- New Wiring
- New Pins
- Labeled
- Fully Disassembled
- All Parts Cleaned
- Full Functionality Tested on an Actual Lam Rainbow Tool
New Harmonic Core Replacement Option Available To Address Wafer Handling Issues (See Photo)