skip to Main Content
Made in the USA | 1-888-SEMIGROUP  |  parts@semigroup.com | Contact Us

853-001198-002 | 490 Gate

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

  • Brand New Gates
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

Request Service Now

Hidden
Name(Required)
Down a tool? Request Expedited Service.
This field is for validation purposes and should be left unchanged.

SKU 853-001198-002-BO Categories ,

Description

OEM Part Number 853-001198-002

LAM Research Auto Etch Gate Corrosion Resistant Inner

The AutoEtch Gate assembly is a precision mechanical isolation barrier between atmosphere/load locks & the main chamber of the AutoEtch. It is designed for repeatable precision wafer processing and will function flawlessly for thousands of cycles depending on process chemistry.

Applications Include:

All Lam Research Standalone AutoEtch 490, 590, 690 & 790 Platforms.

Features

  • Brand New Gates
  • Exchange & Refurbishing Services Available
  • New Anodized Door
  • New Gate Stops
  • New Screws
  • New Bearings
  • New Bushings
  • New Shims
  • New Spring
  • New Sprocket
  • New Compression Fitting
  • New Mounting Hub
  • New Clevis
  • New Roll Pins
  • Full Functionality Tested

Additional information

CONDITION

Buy Outright, Quick Exchange, Refurbishment Service Available – Call for RMA#