268661 | Fusion HV Module HV Module Call 1-888-736-4476 to check availability. SKU: 268661-BO Category: Assemblies Description Description OEM Part Number 268661 Axcelis, Fusion HV Module Related products Out of Stock View Details 853-012175-004 | Harmonic Arm Drive Call 1-888-736-4476 to check availability. Out of Stock View Details 853-012175-001 | Harmonic Arm Drive Call 1-888-736-4476 to check availability. View Details 853-032776-001 | Paddle Lifter In stock