Skip to content
Made in the USA | 1-888-SEMIGROUP |
parts@semigroup.com
|
Contact Us
Why SemiGroup?
Parts & Equipment
AM CMP Pad Conditioning Arm
Lam Research Gap Drives
Lam Research Style ESCs for 4400, 4420, 9400 & 9600 reactors
Isotropic Heated Paddle Assemblies
Gate, Door, and Slit Assemblies
Wafer Fab Consumable Parts
CMP Consumable Parts
All Parts & Equipment
Service
Gap Drive Refurbishment
Chillers
CMP Heads
Turnkey CMP Head Refurbishment
CMP Pad Conditioning Arm Refurbishment & Replacement Parts
Dry Scroll Pumps
Harmonic Arm Drives
Power Suppplies
Printed Circuit Boards
Radio Frequency (RF) Generators
RF Match Tuning
Remote Plasma Source (RPS) Refurbishment
Servo Motors Refurbishment
Vacuum Isolation Valves
Get Help Fast
Cart
0
0 Items
-
Search
Open mobile menu
Close mobile menu
Search
Shop
Home
»
Shop
»
268661 | Fusion HV…
268661 | Fusion HV Module
HV Module
Request Service Now
This field is hidden when viewing the form
Product Name/ID
Name
(Required)
First
Last
Company
(Required)
Location
(Required)
Email
(Required)
Phone
(Required)
Down a tool? Request Expedited Service.
Yes! Tell me about rush options.
Comments
This field is for validation purposes and should be left unchanged.
Δ
SKU
268661-BO
Category
Assemblies
Description
Description
OEM Part Number 268661
Axcelis, Fusion HV Module
Similar Products
Other Related Products
Related products
Out of Stock
View Details
853-012875-002 | LAM Research Gate Assemblies
Call 1-888-736-4476 to check availability.
Out of Stock
View Details
853-012200-004 | LAM Research Gate Assemblies
Call 1-888-736-4476 to check availability.
Out of Stock
View Details
853-032776-605 | Paddle Lifter
Call 1-888-736-4476 to check availability.
Out of Stock
View Details
853-012175-001 | LAM Research Harmonic Arm Drive
Call 1-888-736-4476 to check availability.
Search
Your Cart
Your cart is empty.