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SG853-021917-006 | 150mm Isotropic Heated Paddle for LAM 853-021917-006, ASSY, HTR PADDLE-FDTHRU, ISO, 6″

OEM                               Lam Research OEM Part Number      853-021917-006

Features


  • Base Material - Aluminum 6061

  • Surface Treated - Clear Anodize

  • Operating Range - 0-120 Deg C

  • Surface Flatness - < 1.0 mil

  • Anodize Thickness - .4 to .6 mil

  • Operating Voltage - 110 VAC

  • Feed Through - Aluminum, RF Filtered, Hermetically Sealed

  • Drop in Replacement - Yes

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