skip to Main Content
Made in the USA | 1-888-SEMIGROUP  |  parts@semigroup.com | Contact Us

S716-011564-003 | Lam Research Electrode Upper Graphite SFG – OEM Part 716-011564-003

Features


  • Particle Size - 1 μm (40 μin)

  • Pore size - 0.3 μm (12 μin)

  • Coefficient of thermal expansion μm/m°C (μin/in°F) -  8.1 (4.5)

  • Compressive Strength - 166 MPa (24,100 psi)

  • Flexural Strength - 96 MPa (13,900 psi)

  • Tensile Strength - 67 MPa (9700 psi)

  • Shore Hardness - 74

  • Electrical Resistivity μΩ-cm (μΩ-in) - 950 (770)

  • Apparent density g/cm³ (lb/in³) - 1.77 (0.064)

  • Thermal conductivity W/m-K (Btu-ft/hr/ft2°F) - 75 (44)

  • Oxidation threshold - 470°C (880°F)