0010-77533 | Applied Materials 200mm MIRRA Titan 1 HEAD

Features

• Visual Inspection & Analysis


• DATA Tracking


• Decontamination & Cleaning


• New O- rings


• New Screws Torqued to Spec.


• New Sensors & New Spring


• New Membrane


• New De-Chuck Bladder


• New Rolling Diaphragm


• New Seal Diaphragm


• New Retaining Wear Ring


• New Membrane Support Plate Pad


• Replacement of air lines and air fittings


• Bore and Gimbal Flexure plate shaft re-lubricated


• Post rebuild clean


• Final Visual inspection


• Final Pressure Test to ensure Functionality

 

 

Semigroup's Applied Materials 200mm Mirra Titan 1 Head Turnkey Rebuild Service has been perfected over the last 23 years extending head life expectancy and adding value for our clients so they can focus on Moving More High yielding wafers through the FAB!