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Parts & Equipment
AM CMP Pad Conditioning Arm
Lam Research Gap Drives
Lam Research Style ESCs for 4400, 4420, 9400 & 9600 reactors
Isotropic Heated Paddle Assemblies
Gate, Door, and Slit Assemblies
Wafer Fab Consumable Parts
CMP Consumable Parts
All Parts & Equipment
Service
Gap Drive Refurbishment
Chillers
CMP Heads
Turnkey CMP Head Refurbishment
CMP Pad Conditioning Arm Refurbishment & Replacement Parts
Dry Scroll Pumps
Harmonic Arm Drives
Power Suppplies
Printed Circuit Boards
Radio Frequency (RF) Generators
RF Match Tuning
Remote Plasma Source (RPS) Refurbishment
Servo Motors Refurbishment
Vacuum Isolation Valves
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