Features
- New Vertical Bearings
- New Leadscrew and Ball-nut
- New Rotation Bearing
- New Arm Bearings
- New Coil Cable
- New Wafer Pan Coil Tubes
- New Power Off Brake
- New Emitters
- Upper Rotation Belt
- Rotation and Vertical Belts
- New Opto-isolators
- New Coil Vacuum Line
- New Electrical Coiled Cable
- Fully Disassembled
- All Parts Cleaned
- Full Functionality Tested on an Actual Fusion Tool
Functionality Checklist
- Check Robot Initialization & Home Positioning
- Check Repeatability to Left Cassette Platform
- Check Repeatability to Right Cassette Platform
- Check rotation to both Left & Right Cassette Platforms
- Check Repeatability to Chamber(s)
- Check repeatability to Left Platform Slot 1, 15 & 25
- Check repeatability to Right Platform Slot 1, 15 & 25
- Check Repeatability of Left Pan Extend & Retract
- Check repeatability of Right Pan Extend & Retract
- Wafer Vacuum Check Right Pan
- Wafer Vacuum Check Left Pan
- Check both Pan Vacuum Levels at Wafer Release and Wafer Clamped
- Perform 100 Wafer Marathon