249021 | Fusion Gemini 3 – Axis Robot Assembly

Features

• New Vertical Bearings


• New Leadscrew and Ball-nut


• New Rotation Bearing


• New Arm Bearings


• New Coil Cable


• New Wafer Pan Coil Tubes


• New Power Off Brake


• New Emitters


• Upper Rotation Belt


• Rotation and Vertical Belts


• New Opto-isolators


• New Coil Vacuum Line


• New Electrical Coiled Cable


• Fully Disassembled


• All Parts Cleaned


• Full Functionality Tested on an Actual Fusion Tool

     Functionality Checklist

1. Check Robot Initialization & Home Positioning


2. Check Repeatability to Left Cassette Platform


3. Check Repeatability to Right Cassette Platform


4. Check rotation to both Left & Right Cassette Platforms


5. Check Repeatability to Chamber(s)


6. Check repeatability to Left Platform Slot 1, 15 & 25


7. Check repeatability to Right Platform Slot 1, 15 & 25


8. Check Repeatability of Left Pan Extend & Retract


9. Check repeatability of Right Pan Extend & Retract


10. Wafer Vacuum Check Right Pan


11. Wafer Vacuum Check Left Pan


12. Check both Pan Vacuum Levels at Wafer Release and Wafer Clamped


13. Perform 100 Wafer Marathon