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249021 | Fusion Gemini 3 – Axis Robot Assembly

Features


  • New Vertical Bearings

  • New Leadscrew and Ball-nut

  • New Rotation Bearing

  • New Arm Bearings

  • New Coil Cable

  • New Wafer Pan Coil Tubes

  • New Power Off Brake

  • New Emitters

  • Upper Rotation Belt

  • Rotation and Vertical Belts

  • New Opto-isolators

  • New Coil Vacuum Line

  • New Electrical Coiled Cable

  • Fully Disassembled

  • All Parts Cleaned

  • Full Functionality Tested on an Actual Fusion Tool


     Functionality Checklist



  1. Check Robot Initialization & Home Positioning

  2. Check Repeatability to Left Cassette Platform

  3. Check Repeatability to Right Cassette Platform

  4. Check rotation to both Left & Right Cassette Platforms

  5. Check Repeatability to Chamber(s)

  6. Check repeatability to Left Platform Slot 1, 15 & 25

  7. Check repeatability to Right Platform Slot 1, 15 & 25

  8. Check Repeatability of Left Pan Extend & Retract

  9. Check repeatability of Right Pan Extend & Retract

  10. Wafer Vacuum Check Right Pan

  11. Wafer Vacuum Check Left Pan

  12. Check both Pan Vacuum Levels at Wafer Release and Wafer Clamped

  13. Perform 100 Wafer Marathon