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641PM-36PM-1001 | LAM Research VAT PM5 Adaptive Pressure Controller 641PM-36PM-1001

AVAILABLE FOR SERVICE REBUILD ONLY

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SKU 641PM-36PM-ACB1+TST-REP Category Turbo Pump and Controller

LAM Research VAT PM5 Adaptive Pressure Controller 641PM-36PM-1001

1 Year Warranty