Description

OEM Part Number 02-307391-00

Novellus / LAM Research Speed Dome 200mm Refurbishment

6 month Warranty

The Semigroup dome refurbishment starts with stripping the dome to the bare ceramic, we then vacuum test and check for cracks or chips that could cause premature failure. After the dome passes the first inspections it is sent out for acid clean, DI pressure rinse and then dried, the dome is bead blasted to the standard Ra or a customer requested Ra as low as 60 Ra or up to a 180 Ra finish. The o-ring sealing surface is reworked if needed. The dome is the pressure washed again and then oven dried in a clean room, the inside of the dome is then sealed off from the elements.

At this point the dome becomes the same as a “new” build, every component is replaced with new parts, new copper tubing, new G10, new fittings, new hardware and new elastomer, the dome is tested and must meet all specifications to operate on par with a new dome.

All of Semigroup’s domes are made to operate as a High Power Dome, SG uses G10 to replace fiberglass that is prone to failure, this is done on all the domes new or refurbished.