Mirra CMP Head Rebuild Mirra CMP AVAILABLE FOR SERVICE REBUILD ONLY. Complete our service request form for an estimate Categories: Assemblies, CMP Parts/Consumables Description Description AMAT Mirra 200mm CMP Head Rebuild Service Related products View Details 853-012123-001 | Harmonic Arm Drive In stock View Details 853-012123-004 | Harmonic Arm Drive In stock Out of Stock View Details 853-012200-002 | LAM Gate Assemblies Call 1-888-736-4476 to check availability.