OEM Part Number 853-012600-001
LAM Research Indexer Assembly, Send
1 Year Warranty
Indexer Assembly, Send
IN A RUSH?? Semigroup offers a Quick Exchange Service (If In Stock) to HOT SHIP a new or refurbished unit to you immediately getting you back in production FAST! Our standard refurbishment service is also available typically with a 2-4 week lead time. Call us at 1-888-736-4476 or go to the “GET HELP FAST” button and fill out the form to get started. The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement.