268661 | Fusion HV Module – Quick Exchange Option and Repair HV Module AVAILABLE FOR SERVICE REBUILD ONLY. Complete our service request form for an estimate SKU: 268661-REP Category: Assemblies Description Description OEM Part Number 268661 Axcelis, Fusion HV Module Related products Out of Stock View Details 853-090221-001 | Autoetch Gap Adjust Sprocket Assembly Call 1-888-736-4476 to check availability. Out of Stock View Details 853-012350-001 | LAM Gate Assemblies Call 1-888-736-4476 to check availability. Out of Stock View Details 853-001198-001 | 490 Gate Call 1-888-736-4476 to check availability.