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C-2134-086-0001 Ebara Rotary Union

Semigroup offers service and support for various OEM CMP sub-assemblies.

Features


  • Fully Disassembled

  • All Parts Cleaned

  • Lap & Polish All Carbide Pieces

  • Install New Springs, O-rings, Bearings, and Seals

  • Re-grease As Needed

  • Re-assemble to OEM Spec

  • Pressure Test That Assembly is Leak Tight

  • New Carbide Pieces Made As Needed