skip to Main Content
Made in the USA | 1-888-SEMIGROUP  | | Contact Us

C-2134-086-0001 Ebara Rotary Union

Semigroup offers service and support for various OEM CMP sub-assemblies.


  • Fully Disassembled

  • All Parts Cleaned

  • Lap & Polish All Carbide Pieces

  • Install New Springs, O-rings, Bearings, and Seals

  • Re-grease As Needed

  • Re-assemble to OEM Spec

  • Pressure Test That Assembly is Leak Tight

  • New Carbide Pieces Made As Needed