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853-015130-103 | LAM Research RF Mini-Match

853-015130-103 | LAM Research RF Mini-Match

Features


  • Fully Disassembled

  • All parts cleaned

  • New Motors

  • New Potentiometers

  • New Capacitors as required

  • All RF Silver-plated components are restored to original specifications

  • New hex mounting screws

  • Replace gears as required

  • New grounding wires

  • Test and calibrate RF peak detect board

  • Full functionality tested on an actual LAM Rainbow tool.

    • Verify RF Plasma is confined with zero watts reflected power

    • Back side helium@ 10T pressure

    • Communication to tool is verified