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The Lam Research Harmonic Arm Drive Assembly provides highly reliable and repeatable wafer placement. Applications Include: All Rainbow Standalone PlatformsFeatures
- New Belts
- New Bearings
- New Quad Seals
- New O-rings
- New Sensors
- New Stepper Motors
- New Connectors (Metal or Viking)
- New Wiring
- New Pins
- Labeled
- Fully Disassembled
- All Parts Cleaned
- Full Functionality Tested on an Actual Lam Rainbow Tool
- New Harmonic Core Replacement Installed To Address Wafer Handling Issues (Picture Below)