0010-54184 | Applied Materials High Performance Pad Conditioner Arm – Overhaul

Features

• New Bearings


• New O-Rings


• Fully Disassembled


• All Parts Cleaned


• Vibration Sensor Tested


• Wave Generator, Flex Spline, Circular Spline (Disassemble and inspect, clean, regrease and reassemble).


• All Fasteners Replaced


• Rotation and Sweep Motors are Fully Refurbished


• Powder Coating Service


• Sensor Replacement


• Boot Replacement