Semigroup sets a high criteria when selecting consumable suppliers, in fact most of our chamber part suppliers are OEM suppliers as well. The All Aluminum ESCs are no exception, this supplier has over 30 years of experience manufacturing ESC’s, using all of the industries best known methods they produce some of the highest quality parts on the market. These parts are serialized and come with lot traceability, from the raw material all the way through to final test. As always at Semigroup we demand that our parts are made “copy exact” insuring that there are no process shifts during qualification or any variances years down the road.
The ESC’S are machined to exacting standards, are packaged in a cleanroom and all are shipped with a test report.
We also know that our customers demand more than just high quality components, part availability is equally as important. We use an algorithm-based system to predict usage data; we add in new customer demand and safety stock factors to forecast our quantity on hand requirements. This gives us the best chance to have parts in stock for emergencies and also keeping lead times shorter overall.
Semigroup is offering cost reduction without compromise, the highest quality parts, stock on hand, fast processing of orders and all at the lowest price out there.
Available LAM Research Electrostatic Chuck OEM Part Numbers:
SemiGroup Copy Exact Parts
SemiGroup’s copy exact solutions promise that clients will have to make no configuration changes to their equipment and will see no process shifts when installing our parts.
Our engineers previously worked in wafer fabs so they know the importance of a part working exactly as expected – the first time.
SemiGroup has been providing legacy after-market parts and assemblies for over 26 years!
These parts are newly crafted and made in the USA.
OEM Quality without the OEM Price…
Now THAT’s a winning strategy!
Get parts shipped ⚡FAST!⚡
Applications Include:
Lam Research 4400, 4420, 9400 & 9600 reactors & Metal Plasma Etch & Poly Nitride Plasma Etch Reactors
Key Terms:
Monopolar ESC, Electrostatic chuck, ESC Plasma Etch, Metal Plasma Etch, Poly Nitride Plasma Etch 9400 & 9600, Backside Helium Cooling, Anodized Aluminum ESC (Electrostatic Chuck), 150mm ESC, 200mm ESC
We stock a wide selection of LAM Research Electrostatic Chuck parts that are highly reliable and are guaranteed to perform as the OEM part. We strive to have these parts ***IN-STOCK*** and they are qualified in wafer fabs all over the world!
Call 1-888-736-4476 to check availability.
Transparency Guarantee
At SemiGroup, we guarantee to provide you with transparency about why your equipment is failing and how to fix it. We’re accountable to customers, not stockholders. We are dedicated to our customers’ success and strive to offer high-quality, long-lasting, and cost-effective parts and services.
Trust SemiGroup for the parts and repairs you need today!
SemiGroup - The Leader in After-Market Semiconductor Equipment Support
SemiGroup uses only the highest quality aftermarket parts, employs trained and experienced technicians, and takes each piece of repaired equipment through a rigorous inspection checklist.
How can we help YOU with those hard-to-find components? Meet us on a phone or video call and tell us about your production challenges. Let’s see if we’re a good fit! SemiGroup’s success strategy is built on long-term success for every customer!
Call 1-888-SEMIGROUP or email parts@semigroup.com.
Visit our online shop to request more information, browse parts, and start a new service request.
