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AX7695-2

78D5C268-AA4F-40A6-AD94-896A1BF4F6BF

AX7695 | MKS R*evolution III Remote Plasma Source Refurbishment

RPS Refurbishment / Overhaul Introduction (PDF)

AVAILABLE FOR SERVICE REBUILD ONLY

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SKU AX7695-REP Category RPS Generators

Description

Description

OEM Part Number AX7695

MKS R*evolution III Remote Plasma Source, 6dlm, O2 Flow, Refurbishment

90 Day Warranty