853-025083-001 | LAM Research RF Mini-Match

Features

• Fully Disassembled


• All parts cleaned


• New Motors


• New Potentiometers


• New Capacitors as required


• All RF Silver-plated components are restored to original specifications


• New hex mounting screws


• Replace gears as required


• New grounding wires


• Test and calibrate RF peak detect board


• Full functionality tested on an actual LAM Rainbow tool.
  
  
  
  • Verify RF Plasma is confined with zero watts reflected power
  
  
  • Back side helium@ 10T pressure
  
  
  • Communication to tool is verified