skip to Main Content
Made in the USA | 1-888-SEMIGROUP  |  parts@semigroup.com | Contact Us

FI20162-1 | Astex Magnetron Head Refurbishment

Astex (FI20162-1) Magnetron Head – Refurbishment – 12″ PSK / AMAT Tera21 Ashing / Lam 2300 Kiyo / TEL / ULVAC

AVAILABLE FOR SERVICE REBUILD ONLY

Complete our service request form for an estimate

Request Service Now

Hidden
Name(Required)
Down a tool? Request Expedited Service.
This field is for validation purposes and should be left unchanged.

SKU FI20162-1-REP Category

Description

OEM Part Number FI20162-1

Astex (FI20162-1) Magnetron Head – Refurbishment – 12″ PSK / AMAT Tera21 Ashing / Lam 2300 Kiyo / TEL / ULVAC

90 Day Warranty