Made in the USA | 1-888-SEMIGROUP | parts@semigroup.com | Contact Us

853-013800-001 | LAM Research Shuttle Assembly Refurbishment

AVAILABLE FOR SERVICE REBUILD ONLY

Complete our service request form for an estimate

Request Service Now

Hidden

Product Name/ID

Name(Required)

First Last

Company(Required)

Location(Required)

Email(Required)

Phone(Required)

Down a tool? Request Expedited Service.

Yes! Tell me about rush options.

Phone

This field is for validation purposes and should be left unchanged.

SKU 853-013800-001- REP Category Assemblies

Description

Description

OEM Part Number 853-013800-001

LAM Research Shuttle Assembly APM TCP 9600

1 Year Warranty

Similar Products

Other Related Products